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The aim of the presented work is to design and realize an electronic controlled nanopositioning system based on piezoelectric motors.

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Academic year: 2021

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Abstract

The aim of the presented work is to design and realize an electronic controlled nanopositioning system based on piezoelectric motors.

In the Chapter 1, the piezoelectric effect is illustrated, since it was discovered until the most recent studies, integrated by a brief mathematic description. The criteria used to design a whole positioning system based on feedback are analysed and the interferometry is carefully described.

In the Chapter 2, piezoelectric motors are analysed and their main features described in depth; new systems using leveraggi and stacks are mentioned. At the end of the chapter there is a deeply analysis of the fundamental element of the project: the piezoelectric motor Piezo LEGS

TM

by P iezoM otor company, whose

R

the driver and the structure of motor housing is described.

Chapther 3 is the core of this work, with focuses on several driving algorithms with particular emphasis on the adopted strategy. Subsequently the system built in the laboratory is illustrated. It is formed by three main components: software, electronic and optic. In the software section, the wave that drives the piezoelectric motor is generated as well as the interface connecting the PC with the motor driver.

The electronic part is necessary to drive the motor and to interface the interferometer to the PC. The interferometer is carefully described in the optic section eventually, pointing out its mechanical support.

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Abstract In the Chapter 4, all measurements obtained with the implemented system are collected, in order to highlight advantages but also to show limitations.

In the Conclusions, a summary of the reported results is proposed as well as emerging issues are investigated and troubleshooted whenever possible. Additional tests are recommended and suitable uses in the future are proposed.

In the Appendix, a brief description on Weiss domains and on Aluminium Oxide is provided. Source codes are entirely reported and piezoelectric effect is mathematically described taking into account Auld’s model. Eventually, all acquired data is reported together with the datasheets of employed compenents.

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