Mechanical Bearing, Ball-Screw Stage

APPENDICE

• Datasheet slitte lineari, ATS115 Aerotech

• Disegno attuatore lineare per estrusione, Z625B Thorlabs

• Disegno della struttura meccanica del nuovo sistema di microfabbricazione

Linear StagesATS115 Series





















      

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ATS115 Series

Mechanical Bearing, Ball-Screw Stage

The ATS115 is Aerotech’s smallest hard cover, side-sealed stage design. Competitive pricing coupled with Aerotech’s reputation for producing high-quality linear motion devices make the ATS115 an attractive stage for medium-

performance applications.

Rugged Construction

The hard-cover design provides protection from debris. The robust aluminum cover is hard-coated to provide a scratch resistant surface.

The side seals keep dirt and particulates out of the stage and protect the bearing surfaces from contamination. The vertical orientation of the seals easily deflects debris away from the stage. Competitive top seal designs can collect debris, resulting in the eventual failure and replacement of the sealing mechanism.

NEMA 23 Flange-Mount

The ATS115 has a NEMA 23 flange-mounting interface for attachment of a wide variety of Aerotech and third-party motors. Aerotech can provide brush, brushless, and stepper motors preconfigured and mounted directly to the stage for integration with Aerotech controls. Or the stage can be purchased without the motor for the attachment of third- party motors.

Easily Accessible Mounting

The mounting holes in the ATS115 base are accessible

Travels up to 600 mm Speeds up to 300 mm/s

Side seal design with hard-cover Low-cost; high performance

Long-life linear motion guide bearing system

with brush attachments to clear debris that may collect on the hard cover. Tabletops with hole patterns that allow the direct attachment of Aerotech’s ADRS and ACS-LP series low profile direct-drive rotary stages are available.

Configuration Options

Aerotech’s BMS series brushless, slotless servomotor with square-wave encoder output provides a net resolution of 0.5 micron. An optional analog output encoder can be coupled with external interpolation electronics to provide higher resolution. A holding brake can be added to the motor for vertical applications. A motor fold-back kit is available for space-constrained applications to reduce the overall stage length.

Linear StagesATS115 Series ATS115 Series SPECIFICATIONS

l e d o M c i s a

B ATS115-50 ATS115-100 ATS115-150 ATS115-200 ATS115-250

l e v a r T l a t o

T 50mm(2in) 100mm(4in) 150mm(6in) 200mm(8in) 250mm(10in) m

e t s y S e v i r

D BallScrew/BrushlessServomotor(BMS60-A-D25-E2500H) e

g a t l o V s u

B Upto160VDC

s u o u n i t n o C

t n e r r u C

A_pk Upto2.3A

A_rms Upto1.6A

k c a b d e e

F NoncontactRotaryEncoder(2500ilne)

y c a r u c c

A ±6µm ±6µm ±8µm ±8µm ±10µm

y t i l i b a t a e p e R l a n o i t c e r i d i

B ±1µm

) d a e l v e r / m m 5 ( n o i t u l o s e

R 0.5µm(20µin)with2500ilneQuadratureEncoder d

e e p S l e v a r T m u m i x a

M ⁽¹⁾ 300mm/s(12in/s)

m u m i x a M

d a o L ⁽²⁾

l a t n o z i r o

H 40.0kg(88lb)

l a c i t r e

V 18.2kg(40lb)

e d i

S 40kg(88lb)

e g a t S l a n i m o N

t h g i e W

r o t o M s s e

L 3.7kg(8.1lb) 4.1kg(9.0lb) 4.6kg(10.1lb) 5.0kg(11.0lb) 5.5kg(12.1lb) r

o t o M h t i

W 4.8kg(10.6lb) 5.2kg(11.4lb) 5.7kg(12.5lb) 6.1kg(13.4lb) 6.6kg(14.5lb) n

o i t c u r t s n o

C AluminumBody/BlackAnodizeFinish/Hardcoat :

s e t o N

. y c a r u c c a e g a t s t c a p m i y a m e l c y c y t u d e v i s s e c x E . 1

. l e v a r t f o ) s e h c n i n o il li m 0 0 1 ( m k 0 0 5 2 f o e f il g n i r a e b d n a w e r c s ll a b n o d e s a b d n a m e t s y s s i x a - e l g n i s r o f e r a s n o i t a c i f i c e p s d a o l y a P . 2

l e d o M c i s a

B ATS115-300 ATS115-400 ATS115-500 ATS115-600

l e v a r T l a t o

T 300mm(12in) 400mm(16in) 500mm(20in) 600mm(24in) m

e t s y S e v i r

D BallScrew/BrushlessServomotor(BMS60-A-D25-E2500H) e

g a t l o V s u

B Upto160VDC

s u o u n i t n o C

t n e r r u C

A_pk Upto2.6A

A_rms Upto1.6A

k c a b d e e

F NoncontactRotaryEncoder(2500ilne)

y c a r u c c

A ±10µm ±12µm ±14µm ±16µm

y t i l i b a t a e p e R l a n o i t c e r i d i

B ±1µm

) d a e l v e r / m m 5 ( n o i t u l o s e

R 0.5µm(20µin)with2500 ilneQuadratureEncoder d

e e p S l e v a r T m u m i x a

M ⁽¹⁾ 300mm/s(12in/s) 250mm/s(10in/s)

m u m i x a M

d a o L ⁽²⁾

l a t n o z i r o

H 40.0kg(88lb)

l a c i t r e

V 18.2kg(40lb)

e d i

S 40kg(88lb)

e g a t S l a n i m o N

t h g i e W

r o t o M s s e

L 5.9kg(13.0lb) 6.8kg(15.0lb) 7.6kg(16.7lb) 8.5kg(18.7lb) r

o t o M h t i

W 7.0kg(15.4lb) 7.9kg(17.4lb) 8.7kg(19.1lb) 9.6kg(21.1lb) :

s e t o N

. y c a r u c c a e g a t s t c a p m i y a m e l c y c y t u d e v i s s e c x E . 1

. l e v a r t f o ) s e h c n i n o il li m 0 0 1 ( m k 0 0 5 2 f o e f il g n i r a e b d n a w e r c s ll a b n o d e s a b d n a m e t s y s s i x a - e l g n i s r o f e r a s n o i t a c i f i c e p s d a o l y a P . 2

Linear StagesATS115 Series

ATS115 Series DIMENSIONS

200 300 400 500 600 700

100 193.9

30.2

STAGE LENGTH"A"

LENGTH

"B"

MOTOR

100

A

OPTIONAL FOLDBACK (-8 ORIENTATION) SHOWN WITH BRAKE

C = # OF MOUNTING HOLES

6.8 12.7

60.9 8 TOP OF MOTOR TOP OF BRAKE64.1

115 W/ OPTIONAL70

TABLETOP

TOP OF CARRIAGE60 OPTIONAL FOLDBACK

-8 ORIENTATION

115

137 75 [3.00]SQ.

100 [4.00]SQ.

50 [2.00]SQ.

25 [1.00]SQ. M6x1.0 [1/4-20] 7.0 [.30]

(16) PLACES CENTERED ON TABLETOP

M6x1.0 7.0 (4) PLACES CENTERED ON TABLETOP

OPTIONAL TABLETOP -TTM [-TTU]

10

100 125

100 TYP.

M6x1.0 7.0 (4) PLACES CENTERED ON CARRIAGE

M5x0.8 5.8 (6) PLACES CENTERED ON CARRIAGE OPTIONAL FOLDBACK

-12 ORIENTATION

BASIC MODEL DIMENSIONS - MM

A B B (BRAKE) C

ATS115-050 287.6 132.3 209.5 4

ATS115-100 337.6 132.3 209.5 8

ATS115-150 387.6 132.3 209.5 8

ATS115-200 437.6 132.3 209.5 12

ATS115-250 487.6 132.3 209.5 12

ATS115-300 537.6 132.3 209.5 16

ATS115-400 637.6 132.3 209.5 20

ATS115-500 737.6 132.3 209.5 24

Linear StagesATS115 Series

115

90 25 TYP.

100 7.5

M6x1.0 Thd 13 (26) Holes

CL

25

13 2

112

64 416 2

7 Slot Thru 4 Mounting Holes

75.6 75.6

19.7

18.2 12.7 C'Bore

To Depth Shown CL

75 76.2 76.2

75

NOTES:

DIMENSIONS: MILLIMETERS 1.

RECOMMENDED FOR ATS115-050 THRU ATS115-150 2.

HDZ115 Bracket

ATS115 Series — HDZ115 Bracket DIMENSIONS

Linear StagesATS115 Series

ATS115 Series ORDERING INFORMATION

ATS115 Series Linear Ball-Screw Stage

ATS115-050 50 mm (2 in) travel stage with ball screw and limits ATS115-100 100 mm (4 in) travel stage with ball screw and limits ATS115-150 150 mm (6 in) travel stage with ball screw and limits ATS115-200 200 mm (8 in) travel stage with ball screw and limits ATS115-250 250 mm (10 in) travel stage with ball screw and limits ATS115-300 300 mm (12 in) travel stage with ball screw and limits ATS115-400 400 mm (16 in) travel stage with ball screw and limits ATS115-500 500 mm (20 in) travel stage with ball screw and limits ATS115-600 600 mm (24 in) travel stage with ball screw and limits

Tabletop

-TTM Metric pattern tabletop -TTU English pattern tabletop

-NO TT No tabletop

-TT100 Bolt-hole pattern to attach ADRS100 or ACS-100LP rotary stage with vertical or horizontal axis of rotation -TT150 Bolt-hole pattern to attach ADRS150 or ACS-150LP rotary stage with vertical or horizontal axis of rotation /WIPER Wiper option for English and metric tabletops

Ball Screw

-5MM 5 mm per revolution ball screw

Limits

-NC Normally-closed limits

-NO Normally-open limits

Motor

-BMS Brushless servomotor with 2500 line feedback encoder (BMS60-A-D25-E2500H)

-BMS-BRK Brushless servomotor with 2500 line feedback encoder and motor-mounted brake (BMS60-A-D25-E2500H-BK1)

-NM No motor

Motor Orientation

-0 No motor

-2 Bottom cable exit

-3 Left side cable exit

-4 Top cable exit

-5 Right side cable exit

-8 Right side fold-back

n o i t a m r o f n I g n i r e d r O

5 1 1 S T

A -050 -TTM -5MM -NC -BMS -0 -FB -NONE -PLOTS s

e i r e

S Travel(mm) Tabletop BallScrew Limits Motor CableExit Options Coupling Testing

5 1 1 S T

A -050

0 0 1 -

0 5 1 -

0 0 2 -

0 5 2 -

0 0 3 -

0 0 4 -

0 0 5 -

0 0 6 -

M T T -

U T T -

T T O N -

0 0 1 T T -

0 5 1 T T -

R E P I W /

M M 5

- -NC

O N -

S M B -

K R B - S M B -

M N -

0 -

2 -

3 -

4 -

5 -

8 -

2 1 -

5 2 0 B F -

R E P I W E S A B -

E N O N -

5 2 0 C -

S T O L P -

S T O L P O N -

Linear StagesATS115 Series ATS115 Series ORDERING INFORMATION

Options

-FB025 Motor fold back kit for 0.25" diameter motor shaft

-BASE WIPER Wiper on base of top axis of X/Y pair to clear hardcover of the bottom axis

Coupling Option

-NONE No motor coupling supplied -C025 0.25" diameter motor shaft coupling

Testing

-PLOTS Accuracy and repeatability plots -NO PLOTS No performance plots

Accessories (to be ordered as separate line item)

ALIGNMENT-NPA Non-precision XY assembly ALIGNMENT-NPAZ Non-precision XZ or YZ assembly ALIGNMENT-PA10 XY assembly; 10 arc sec orthogonal

ALIGNMENT-PA10Z XZ or YZ assembly with L-bracket; 10 arc second orthogonal ALIGNMENT-PA5 XY assembly; 5 arc sec orthogonal

ALIGNMENT-PA5Z XZ or YZ assembly with L-bracket; 5 arc second orthogonal

HDZ115 Right angle L-bracket for ATS115-050, ATS115-100, and ATS115-150 only

0 0 0 0 0 0 0 0

-e ^{C 8-} _{\ "} ^O-

O O O O

O O O O

0 0 0 0 0 0 0 0 0

e o o o p o o o o