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Tungsten Oxide Nanowires on Micro Hotplates for Gas Sensing Applications

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Procedia Engineering 120 ( 2015 ) 439 – 442 Available online at www.sciencedirect.com

1877-7058 © 2015 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/).

Peer-review under responsibility of the organizing committee of EUROSENSORS 2015

doi: 10.1016/j.proeng.2015.08.663

ScienceDirect

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a University of Brescia (DII), Via Valotti 9, 25133 Brescia, Italy b CNR-INO, Via Branze 38, 25133 Brescia, Italy

c ams Sensor Solutions Germany GmbH, Gerhard-Kindler-Str. 8, 72770 Reutlingen, Germany

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© 2015 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/).

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440 Dario Zappa et al. / Procedia Engineering 120 ( 2015 ) 439 – 442

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Figure 1: ams micro hotplate model E120:20. ([SHULPHQWDO 7KHUPDOO\R[LGL]HGWXQJVWHQR[LGHQDQRZLUHVZHUHVXFFHVVIXOO\V\QWKHWL]HGRQDPV(PLFURKRWSODWHVXVLQJ DWXEXODUIXUQDFHLQORZYDFXXP$WKLQOD\HU QP RIPHWDOOLFWXQJVWHQZDVGHSRVLWHGRQWKHKRWSODWHVE\5) PDJQHWURQVSXWWHULQJ :DUJRQSODVPD[PEDUURRPWHPSHUDWXUH $IWHUZDUGVVDPSOHVZHUHR[LGL]HGLQ DWXEXODUIXUQDFHDWƒ&IRURQHKRXULQRUGHUWRSURPRWHWKHJURZWKRIWKHQDQRZLUHV3UHVVXUHLQVLGHWKHDOXPLQD WXEHZDVVHWDWPEDUZLWKDQDUJRQIORZRI6&&0 $ILHOGHPLVVLRQVFDQQLQJHOHFWURQPLFURVFRSH )(6(0 /(2ZDVRSHUDWHGDWN9LQRUGHUWRLQYHVWLJDWH WKHPRUSKRORJ\RIWKHQDQRVWUXFWXUHV

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441 Dario Zappa et al. / Procedia Engineering 120 ( 2015 ) 439 – 442



Figure 2: SEM picture of WO3 nanostructures synthetized on ams substrates, at 600°C with a pressure of 1 mbar (60 minutes).

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Figure 3: Raman Spectroscopy of WO3 nanostructures synthetized on alumina substrates, at 600°C with a pressure of 1 mbar (60 minutes).

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442 Dario Zappa et al. / Procedia Engineering 120 ( 2015 ) 439 – 442

Figure 4: (left) Dynamic response of WO3 NWs on ams micro hotplate model E120:20 at 200°C, with RH=50%@20°C. (right) Calibration curve and power fitting of WO3 NWs on ams micro hotplate model E120:20

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Figura

Figure 1: ams micro hotplate model E120:20.  ([SHULPHQWDO 7KHUPDOO\R[LGL]HGWXQJVWHQR[LGHQDQRZLUHVZHUHVXFFHVVIXOO\V\QWKHWL]HGRQDPV(PLFURKRWSODWHVXVLQJ DWXEXODUIXUQDFHLQORZYDFXXP$WKLQOD\HUQPRIPHWDOOLFWXQJVWHQZDVGH
Figure 3: Raman Spectroscopy of WO 3  nanostructures synthetized on alumina substrates, at 600°C with a pressure  of 1 mbar (60 minutes)
Figure 4: (left) Dynamic response of WO 3  NWs on ams micro hotplate model E120:20 at 200°C, with  RH=50%@20°C

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