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viii

Contents

Abstract………...………..…………..…...iv Riassunto………...……….…..…v Acknowledgments………...…………..…vi 1. Chapter 1 – Introduction………..…...…..…1 1.1 Nanotechnologies………...…..………...….……1

1.2 Nanorobotics and micro/nano-world theory………..…..…....…….…4

1.3 Approach to micro/nano-manipulation………….…….….….……...…...……5

1.4 Micro/nano-manipulation techniques…………...………..………...………6

1.4.1 Contact-based techniques overview……….……...…...…………7

1.4.2 Contact-free techniques overview………...………...…9

1.5 Objectives of the project………....…....…………...9

1.6 Actual system………...…………...………...…10

1.7 Deficit of the system and targets………....……...…..……….…13

1.8 References………...……….……14

2 Chapter 2 - Vacuum chamber analysis and mechanical interface design...16

2.1 Vacuum chamber……….….….…..….….………...…………...16

2.2 Functionality and considerations………...………..18

2.3 Analysis of the problems……….….….………….…....…19

2.4 Study and design of the solution………….….….…...20

2.4.1 Model I………..….….……….….….………….………22

2.4.2 Model II……….….….…..………...…...……25

2.4.3 Final model……….………...……25

2.5 Closing system………...…...…27

2.6 Final assembly and conclusions……….……...29

3 Chapter 3 – Magnification system for images visualization and acquisition…...34

3.1 Introduction………....…...34

3.2 Essential requirements………...………35

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3.4 Study of the new solution………....………...41

3.5 Final solution……….………42 3.5.1 Optical system……….…………42 3.5.2 Lighting system……….………...…45 3.5.3 Focus adjusting………....…...…...….……...…46 3.6 Conclusion.………….……….……….………..………...47 3.7 References………...…………...…48

4 Chapter 4 – Modifications of the actuators power supply and control unit…...50

4.1 System configuration……….……...………...….…50

4.2 Objectives………...………...….….…54

4.3 Strategies for amplifier design……….….….….……...……….….……55

4.4 Selection of the DAQ card………...………...……57

4.5 Basics of OPA and adopted configuration………..………58

4.6 Selection of the OPA………...……….………61

4.7 Amplification’s circuit design……….…...……….……61

4.7.1 Choice of resistance values……….…...….….….….………61

4.7.2 OPA power supply……….……...……62

4.8 Functionality tests……….…...…...65

4.8.1 Working tests with external power supply without external load..65

4.8.2 Working tests with external power supply and external load…...66

4.9 Circuit design, layout and realization………...67

4.10 Conclusions………....……71

4.11 References………...…...…72

5 Chapter 5 – Implementation of the control system and user interface………..…79

5.1 General purpose……….….….…...…79

5.2 Main target and limits……….…………...80

5.3 General specifications………...………..…82

5.4 Matlab® to ADLink® DAQ interface………...………83

5.5 Matlab® GUI………...…………..……86

5.5.1 “Left Piezos” and “Right Piezos” panels…………....…...….…...……87

5.5.2 Combined motion ……….…...……..………88

5.5.3 Init DAQ……….….….….…...………...…89

5.5.4 Update DAQ – voltage limits control……….………...…..89

5.5.5 Global data……….…………...…...…90

5.6 Keyboard control………...…...…90

5.6.1 Getkey function……….………...…….…...……..91

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5.7 Final system design and control panel………....…93

5.8 References………..………....94

6 Chapter 6 – Manipulations and conclusions………...…108

6.1 Manipulations………..………...…108

6.1.1 40[µm] Nylon Sphere Manipulation……….……...….……...109

6.1.2 10[µm] Nylon Sphere Manipulation……...…….….…..…...…110

6.1.3 Graphite Thin Film Manipulation…….………...….…..…...…112

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