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Bibliografia Capitolo 1

[1]Jacob Fraden, “Handbook of Modern Sensors – Physics, Design and Application”

[2]A. Bossi e P. Malcovati, “Misure Elettriche –Dispense su Sensori e Trasduttori” 2002 (245-260) [3]L.-S. Fan, Y.-C. Tai, and R. S. Muller, “Integrated movable micromechanical structures for sensors

and actuators,”IEEE Trans. Electron Devices, vol. 35, 1988 (724–730)

[4]M. Yamada, T. Takebayashi, C. Notoyama, K. Watanabe, “A Switched-Capacitor Interface for Capacitive Pressure Sensors”, IEEE Transactions on Instrumentation and Measurement, vol. 41, no. 1, February 1992 (81-86)

[5]Gregory T. A. Kovacs, Nadim I. Maluf, Kurt E. Petersen, “Bulk Micromachining of Silicon”, PROCEEDINGS OF THE IEEE, VOL. 86, NO. 8, AUGUST 1998 (1536-1551)

[6]Alessandro Giorgetti, Daniele Petraccini, Gian Maria Ricci, “Etching elettrochimico” 1998 (16-20) [7]James M. Bustillo, Roger T. Howe, Richard S. Muller, ”Surface Micromachining for Microelectromechanical Systems”,PROCEEDINGS OF THE IEEE, VOL. 86, NO. 8, AUGUST 1998 (1552-1574)

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