Testo completo
Autore:
Salvatore Surdo __________
Relatori:
Prof. Giuseppe Barillaro __________ Prof. Alessandro Diligenti __________
Prof. Andrea Nannini __________
Anno 2012
UNIVERSITÀ DI PISA
Scuola di Dottorato in Ingegneria “Leonardo da Vinci”
Corso di Dottorato di Ricerca in INGEGNERIA DELL'INFORMAZIONE
Tesi di Dottorato di Ricerca
Advanced Silicon Microstructuring by Electrochemical Micromachining: Technology and Applications
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