Bibliografia
[1] J. H. T. Luong, K. B. Male, J. D. Glennon, Biosensor technology:
Technology push versus market pull, 2008, Biotechnology Advances.
[2] F. R. R. Teles, L.P. Fonseca, Trends in DNA biosensors, 2008, Talanta. [3] J.S. Daniels, N. Pourmand Label-free Impedance biosensors: Opportunities
and Challenges, 2007, Electroanalysis, 19(12): 1239-1257.
[4] J. Wang, From Dna biosensors to gene chips, 2000, Nucleic Acids Research, Vol. 28, No.16 3011-3016.
[5] J. D. Hoheisel, M. Vingron, Dna Chip Technology, 1999, Biochemica No.3. [6] R. H. Liu, S. B. Munro, T. Nguyen, T. Siuda, D. Suciu, M. Bizak, M. Slota,
H. S. D. Danley, A. McShea, Integrated Microfluidic CustomArray Device
for Bacterial Genotyping and Identification, 2006, JALA 11:360-367.
[7] K. Dill, D. D. Montgomery, A. Ghindilis, K.R.Schwarzkopf, Immunoassays
and sequence-specific DNA detection on a microchip using enzyme
amflified electrochemical detection, 2004, J. Biochem. Biophys. Methods,
59, 181-187.
[8] A. V. Oleinikov, M. D. Gray, J. Zhao, D. D. Montgomery, A. L. Ghindilis, K.Dill, Self-Assembling protein Arrays Using Electronic Semiconductor
Microchips and in Vitro Translation, 2003, Journal of proteome Research
2, 313-319.
[9] M. Z. Ansari, C. Cho, Design and Analysis of a high sensitive
Microcantilever Biosensor for Biochemical Applications,2008,
[10] K. M. Hansen, H. F. Ji, G. Wu, R. Datar, R. Cote, A. Majumdar, T. Thundat, Cantilever-Based Optical Deflection Assys for Discrimination of
DNA Single-Nucleotide Mismatches, 2001, Anal. Chem., 73 (7),
1567-1571.
[11] S. M. Yang, C. Chang, T. I. Yin, P. L. Kuo, DNA hybridization
measurement by self-sensing piezoresistive microcantilevers in CMOS biosensor, 2008, Sensors and Actuators B 130 674-681.
[12] R.Berger, E. Delamarche, H.P.. Lang, C. H. Gerber, J. K. Gimzewsky, E. Meyer, H. J. Guntherodt, Surface stress in the self-assembly of
alkanethiols on gold probed by a force microscopy technique, 1998, Appl.
Phys. A, 66, 55-59.
[13] L. G. Carrascosa, M. Moreno, M. Álvarez, L. M. Lechuga,
Nanomechanical biosensors: a new sensing tool, 2005, Trends in
Analytical Chemistry, Vol. 25, No. 3.
[14] M. Calleja, M. Nordstrom, M. Álvarez, J. Tamayo, L. M. Lechuga, A. Boisen, Highly sensitive polymer-based cantilever-sensors for DNA
detection, 2005, Ultramicroscopy,105, 215-222.
[15] G. Shekhawat, et al., Mosfet-Embedded Microcantilevers for Measuring
Deflection in Biomolecular Sensors, 2006, Science 311, 1592.
[16] V. Tsouti, S. Chatzandroulis, D. Goustouridis, P. Normand, D. Tsoukalas,
Design and fabrication of a Si micromechanical capacitive array for DNA sensing, 2008, Microelectronic Engineering 85 1359-1361.
[17] D. Zhang, E. C. Alocilja, Characterization of Nanoporous Silicon-Based
DNA Biosensor for the Detection of Salmonella Enteridis, 2008, IEEE
Sensor Journal, Vol. 8, No. 6.
[18] G.Rong, A. Najmaie, J. E. Sipe, S. M. Weiss, Nanoscale porous silicon
waveguide for label-free DNA sensing, 2008, Biosensors and
Bioelectronics 23 1572-1576.
[20] S. Chan, Y. Li, L. J. Rothberg, B. L. Miller, P. M. Fauchet, Nanoscale
silicon microcavities for biosensing, 2001, Materials Science and
Engineering C,15, 277-282.
[21] A. Nannini, P. Bruschi, Sensori e rivelatori, Servizio Editoriale Universitario di Pisa, 2000.
[22] D. Goncalves, D. M. F. Prazeres, V. Chu, J. P. Conde, Detection of DNA
and proteins using amorphous silicon ion-sensitive thin-film field effect transistors, 2008, Biosensors and Bioelectronics 24 545-551.
[23] S.J. Park, et al., Array-Based Electrical Detection of DNA with
Nanoparticle Probes, 2002, Science 295, 1503.
[24] C.-Y. Tsai, Y.-H. Tsai, C.-C. Pun, B. Chan, T.-Y. Luh, C.-C. Chen, F.-H.Ko, P.-J. Chen, P.-H Chen, Electrical detection of DNA Hybridization
with multiplayer gold nanoparticles between nanogap electrodes, 2003,
Microsystem Technologies 11 91-96.
[25] W. Laureyn, D. Nelis, P. V. Gerwen, K. Baert, L. Hermans,R. Magnée, J.-J. Pireaux, G. Maes, Nanoscaled interdigitated electrodes for impedimetric
biosensing, 2000, Sensors and Actuators B 360-370.
[26] P. V. Gerwen, W. Laureyn, W. Laureys, G. Huyberechts, M. O. D.Beeck, K. Baert, J. Suls, W. Sansen, P. Jacobs, L. Hermans, R. Mertens,
Nanoscaled interdigitated electrode arrays for biochemical sensors, 1998,
Sensors and Actuators B 49 73-80.
[27] Z. Zou, J. Kai, M. J. Rust, J.Han, C. H. Ahn, Functionalized nano
interdigitated electrodes arrays on polymer with integrated microfluidics for direct bio-affinity sensing using impedimetric measurement, 2007,
Sensors and Actuators A,136, 518-526.
[28] A. Franchi, Tesi di laurea, Realizzazione e caratterizzazione di
microbilance risonanti basate su un processo CMOS-compatibile,
Università degli studi di Pisa, Facoltà d’Ingegneria, Corso di Laurea Specialistica in Ingegneria Elettronica, A.A. 2005-2006.
[29] L. Wang, Q. Wei, C. Wu, J. Ji, Q. Liu, M. Yang, P. Wang, Detection of E.
Coli O157:H7 DNA by a Novel QCM Biosensor coupled with Gold Nanoparticles Amplification, 2007, Proceedings of the 7th IEEE International Conference on Nanotecnology.
[30] Y. Lee, S. Lee, H. Seo, S. Jeon, W. Moon, Label-Free Detection of a
Biomarker with Piezoelectric Micro Cantilever Based on Mass Micro Balancing, 2008, Jala.
[31] T. Xu, Z. Wang, J. Miao, L. Yu, C. M. Li, Micro-machined piezoelectric
membrane-based immunosensor array, 2008, Biosensors and
Bioelectronics 24 638-643.
[32] I.-Y. Huang, M.-C. Lee, Development of a FPW allergy biosensor for
human IgE detection by MEMS and cystamine-based SAM technologies,2008, Sensors and Actuators B 132 340-348.
[33] A. Nannini, D. Paci, F. Pieri, P. Toscano, A CMOS-compatible bulk
technology for the fabrication of magnetically actuated microbalances for chemical sensing, 2006, Sensors and Actuators B,118, 343-348.
[34] L. Concialdi, Tesi di Laurea, Caratterizzazione e ottimizzazione del
progetto di risonatori micromeccanici per applicazioni di biosensing,
Università degli studi di Pisa, Facoltà di Ingegneria, Corso di Laurea Specialistica in Ingegneria Elettronica, A:A:2006-2007.
[35] Rohm & Haas Electronics Materials, Megaposit ® SPR 200 Series photoresist.
[36] K. R. Williams, K. Gupta, M. Wasilik, Etch Rates for Micromachining
Processing- Part II, 2003, Journal of Microelectromechanical System, 12,
761-778.
[37] K. R. Williams, R. S. Muller, Etch Rates for Micromachining Processing, 1996, Journal of Microelectromechanical System, 5, 256-269.
[38] S. Wolf, R. N. Tauber, Silicon processing fort he VLSI era, c1986-1990, Sunset Beach: Lattice Press.
[39] G. Yan, P. C. H. Chan, I-M. Hsing, R. K. Sharma, J. K. O. Sin, Y. Wang,
An improved TMAH Si-etching solution without attacking expoded aluminium, 2001, Sensors and Actuators A,89, 135-141.
[40] S. Brida, A. Faes, V. Guarnieri, F. Giacomozzi, B. Margesin, M.
Paranjape, G. U. Pignatel, M. Zen, Microstructures etched in doped TMAH
solutions, 2000, Microelectronics Engineering, 53, 547-551.
[41] K. Biswas, S. Das, D. K. Maurya, S. Kal, S.K. Lahiri, Bulk
micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface, 2005, Microelectonics Journal, 37,
