• Non ci sono risultati.

Capitolo 1 BioMEMS e Funzionalizzazione

N/A
N/A
Protected

Academic year: 2021

Condividi "Capitolo 1 BioMEMS e Funzionalizzazione"

Copied!
33
0
0

Testo completo

(1)

!"#$%&% '

(#%)*)+ , -./0#%/!&#00!0#%/,

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

B1 :*,$&$ 58* 5$+*1,* !A'::$/'!'66"6'$1* &' +$+,"16* $%7"1'58* +) +)/+,%",' '1$%7"1'5' - !" @)16'$1"!'66"6'$1*=

3+'+,$1$ &'#*%+' :*,$&' .*% @)16'$1"!'66"%* )1" +).*%?5'*9 '! :*,$&$ 58* 1$' "//'":$ ),'!'66",$ +' /"+" +) !A),'!'66$ &' :$!*5$!* /'@)16'$1"!' 5"."5' &' !*7"%+' 5$#"!*1,*:*1,* +'" "!!" +).*%?5'* 58* " *1,',0 /'$!$7'58*=

C"!' :$!*5$!* .%*1&$1$ '! 1$:* &' +'!"1'= ! 5".',$!$ +' 5$15!)&* 5$1 !" &*+5%'6'$1* &*! .%$5*++$ &' +'!"1'66"6'$1*=

! "#"$

2324DEF G !"#$%&%"'#$(%")*+!"*& ,-,'%(, H +$1$ &'+.$+','#' $ +'+,*:' :'; 5%$+5$.'5' '1,*7%",' 58* 5$:/'1"1$ 5$:.$1*1,' :*55"1'58* *& *!*,,%$1'58*=

(2)

!!" !#$# %$& '#(()*"#$) +" ,"'-#!)$!#-" ) &..%&.#-" '/) 0#!!#$# -"()1&-) () 2-&$+)**) +" "$.)-)!!) $)((3&,4")$.) "$ '%" !#$# "$!)-"." ) 0-)$+)-) +)'"!"#$" !%((& 4&!) +)(() "$5#-,&*"#$" -"()1&.) '#$ (3&"%.# +" %$ ,"'-#'"-'%".# +" '#$.-#(6 (# ) -&00-)!)$.&$# (& $%#1& 5-#$.")-& +)((& ,"$"&.%-"**&*"#$)7 8 9 9: &2(" )(),)$." ,)''&$"'" )+ )()..-#$"'" &22"%$2#$# &$'/) ,)''&$"!," ,&2$)."'"; .)-,"'"; <%"+"'" )+ )()..-#,&2$)."'"7

!),0" +" &00("'&*"#$" +" +"!0#!"."1" 9 9: !#$#= &'')()-#,).-"; -#4#. ,"$"&6 .%-"**&."; !)$!#-" "$)-*"&("; ,"'-# &..%&.#-"; ,"'-# 0#,0) <%"+"'/); !'&$$)-#.."'"; .-&!+%..#-"; !)$!#-" +" <%!!#; !)$!#-" '/","'" ) !)$!#-" +" 0-)!!"#$)7 >-& () $%#1) &00("'&*"#$" .-#1"&,# ?%)(() 0)- "( '&,0# 4"#,)+"'#; 4"#(#2"'# ) 0)- () &$&("!" '/","'/)7 8 !)$!#-" 0#!!#$# ,"!%-&-) 5)$#,)$" +" 1&-"& $&.%-&= ,)''&$"'&; .)-,"'&; 4"#(#2"'&; '/","'&; #.."'&; ,&2$)."'&7

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

H)( .)-,"$) 9 9: $#$ I -&''/"%!# %$& !"$2#(& &00("'&*"#$) # %$ !"$2#6 (# +"!0#!"."1#J ?%)!.# '#,0#-.& '/) &$'/) " 0-#')!!" +" 5&44-"'&*"#$) $#$ !" (","."$# &+ %$& !"2#(& ."0#(#2"& +" 0-#')!!# # &$'/) &((3%."("**# +" 0#'/" ,&.)-"&("7

C) .)'$"'/) +" 5&44-"'&*"#$) -"2%&-+&$# (& ,"'-#(&1#-&*"#$) K#$%!&# %'$() $(*L 0)- -)&("**&-) +" !)$!#-" ) &..%&.#-" ,"$"&.%-"**&."7 M&( 0%$.# +" 1"!.&

(3)

!"#$"%& '( !"#%'%)$( *$ !"#$ %"&!'!'( "%+,$#( $ -.%"!//$ *$ 0(,,.$"(1$%#! %.$)$#(.$(+!# ! ! !.%)!#!$ *$ +!""(#$"(& +$".%!'! .%#$"( ! % $"( /2''( ,(/! *$ -.%"!//$ '$ %).(3"$ -'(#(.$4 $' +( !.$('! -$5 $# 2/% 6 $' /$'$"$%7 8( +$".%'(9%: .(1$%#! 6 $' 0( %.! ";$(9! -!. +%*!''(.! -(. $ +!""(#$";! /2 /2,/ .( $ *$ /$'$: "$%< +!+,.(#!& "(# $'!9!.& +%''!& /%/-!#/$%#$& %.$31$ ! "%/= 9$(& ";! -%//%#% !//!.! (//!+,'( $ -!. *(.! 9$ ( ( /!#/%.$ *$ 9(.$( #( 2.(7 8( !"#$"( *$ )*+, !"#$ %"&!'!'( 6 >2!''( -$5 "%+2#!+!# ! 2/( ( ! /$"2: .(+!# ! '( -$5 +( 2.(& (#";! /! #!)'$ 2' $+$ (##$ '( !"#%'%)$( *$ -*#.%"/ !"#$ %"&!'!'( '( / ( .$+-$(11(#*% %?.!#*% -%//$,$'$ @ ( .(!# $ -!. >2(#: % .$)2(.*( 'A$# !).(1$%#! *!$ *$/-%/$ $9$ +!""(#$"$ "%# '( +$".%!'! .%#$"( ";! -2B !//!.! .!('$11( ( ! (//!+,'( ( /2''% / !//% C(0!.7 D' .! !"#$";! "%+! '( 8EFD& $' 0%./# )$'1!'( ! '( +$".%0(,,.$"(1$%#! .$: *$+!#/$%#('! 9!#)%#% 2 $'$11( ! /%-.( 2 % /! /$ #!"!//$ ( *$ )!%+! .$! "%# 0( %.$ *$ 0%.+( !'!9( $7

! ! "#$% &'()*+,(-'.'./

8( !"#%'%)$( *!''( )*+, !"#$ %"&!'!'( GHI6 / ( ( '( -.$+( (* !//!.! /9$'2-: -( ( -!. '( .!('$11(1$%#! *$ *$/-%/$ $9$ +$".%+!""(#$"$7 D''( ,(/! *$ ('! !": #$"(& #( ( -!. $' /$'$"$% +%#%".$/ (''$#% !* !.!*$ ( ( *(''! !"#%'%)$! *!$ +$".%: /$/ !+$ -!. '( 0(,,.$"(1$%#! *$ +$".%/ .2 2.! -.$#"$-('+!# ! .$*$+!#/$%#('$& / (##% $ -.$#"$-$ *!''A( (""% ";$+$"% J/2"&!'(K7

8A( (""% ";$+$"% -2B (9!.! "(.( !.$/ $";! $/% .%-!& L$)2.(M7MJDK& % (#$/% .%-!& L$)2.(M7MJNK7 E# -(. $"%'(.!& )'$ ( ("";$ (#$/% .%-$ /0.2 (#% '! -.%-.$! @ *$ ('"2#$ ()!# $ ";$+$"$ '( "2$ 9!'%"$ @ *$ ( (""% *!' /2,/ .( % *$ /$'$"$% *$-!#*! *(''( *$.!1$%#! ".$/ (''%).(3"( J(#$/% .%-$(K7

(4)

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i3N4?@ ,--!=, =! -!5!+!, >SiO2?@ ,$, >Au?@ +$,7, >Cr?' LJ$#**%0=, 5/ .$,.$!/*G =! %0!-,*$,.!%@ M ;#!0=! .,--!N!5/ $!+%F%$/ 7!+$,-*$#**#$/ 7,5*, N/0 =/K0!*/@ 5% +#! "/,7/*$!% K0%5/ =!./0=/ ,FF!%7/0*/ =%559,$!/0*%:!,0/ +$!-*%55,"$%K+% =/5 7%*/$!%5/ =! .%$*/0:%'

! !" #$%&'() *+(%,-'(.+/+/0

E% !"#$%& '(%")'$%*(+(+,1O3 +,0-/0*/ 5% J%NN$!+%:!,0/ =! -*$#**#$/ 7!+$,B /5/**$,7/++%0!+6/ !0*/"$%*/ +6/ 0,0 M .,--!N!5/ J%$/ +,0 5% *$%=!:!,0%5/ -!./ '(%")'$%*(+(+,' D%$*/0=, =%5 -#N-*$%*, =! -!5!+!,@ 5/ .%$*! 7/++%0!+6/ F/0",0, $/%5!::%*/ !0 -#./$K+!/ 7/=!%0*/ 5% =/.,-!:!,0/ =! 7,5*/.5!+! -*$%*! =! 7%*/$!%5/ =!P/$/0B */( % -*$%*! =! 7%*/$!%5/ -*$#**#$%5/@ +6/ -/$F/ % =/K0!$/ 5/ .%$*! 7/++%0!+6/@ A

(5)

!"#$"$ %&'!("%') *'(%') +) ,%'!()%&! *%-().-%&!/ 01!*') *'(%') !"#$"$ *1--!*2 *) %,!"'! +!.")') 3!( +%(! )'% %&&! *'(1''1(! ,!--%")-4! +) 5$(,% +!*)+!(%'%/ 6$ *'(%'$ +) ,%'!()%&! *%-().-%&! )!"! 3$) +)*-)$&'$ -$" 1" $33$('1"$ *$&2 !"'! -4),)-$ -4! "$" 7 )" #(%+$ +) %''%--%(! &! 3%(') +) ,%'!()%&! *'(1''1(%&!8 &%*-)%"+$ 3%(') ,!--%")-4! &)9!(! +) ,1$ !(*) +$ ! "$" %"-$(%'!/

6% '!-")-% +) !"#$%& '(%")'$%*(+(+, :;< 3)= +)>1*%8 !"#$%& '(%")'$%*(+-(+, +) *)&)-)$ 3$&)-()*'%&&)"$8 7 -%(%''!()??%'% +% $**)+$ +) *)&)-)$ -$,! ,%2 '!()%&! *%-().-%&! ! )& *)&)-)$ 3$&)-()*'%&&)"$ -$,! ,%'!()%&! *'(1''1(%&!@ 1"% (%33(!*!"'%?)$"! *-4!,%')-% +) '%&! '!-")-% 7 ()3$('%'% )" A)#1(% ;/B/

A)#1(% ;/BC D-4!,% +) 9%*! 3!( &% '!-")-% +) .!"#$%& /(%")'$%*(+(+,0

!" #$%&'()(&*$ +$,,& '-./-& '/0.(10/,$ 2" 3.(4/ 4/'05$./ %$. +$1*(.$ ,& '-./-& '/0.(10/,$ 6" #$%&'()(&*$ +$,,& '-./-& 4(0.&'-.7--7./-& #" 8$0&*+/ 4/'05$./ %$. ,/ +$1*()(&*$ +$,,/ 4(0.&'-.7--7./ 9" !--/00& '$,$--(:& +$,,& '-./-& '/0.(10/,$

6! +),!"*)$") +!&&! *'(1''1(! -4! *) 3$**$"$ $''!"!(! -$" &% !"#$%& '(%")'$-%*(+(+, *$"$ +) +) !(*) $(+)") +) #(%"+!??% )"5!()$() ()*3!''$ % E1!&&! (!%&)??%'! -$" &% '!-"$&$#)% +) 1!23 '(%")'$%*(+(+,/

(6)

! "#$%#&&'( )*'$+')#!, !,&#%( #!!, -%*.%%.*, !#"(*#%, '$ -.),*/+', 0 !# )(-1 -'2'!'%3 4' '$%,&*#5'($, +($ ' %*#4'5'($#!' +'*+.'%' '$%,&*#%' 6789 #.:,$%#$4( 4*#-%'+#:,$%, !# :'$'#%.*'55#5'($,; <.,-%( %')( 4' %,+$(!(&'# $,+,--'%# =.'$4' 4' .$ -,% 4' :#%,*'#!' -%*.%%.*#!'9 :#%,*'#!' -#+*'/+#!' , -(!",$%' +>':'+' ),* !?#%%#++( +>, -'#$( +(:)#%'2'!'; :#%,*'#!' -%*.%%.*#!' 4,"($( &(4,*, 4' )*()*',%3 +>':'+>, , /-'+>, #4,&.#%, #!!, #))!'+#5'($' # +.' -($( 4,-%'$#%'9 (!%*, # 4(",* #",*, -(44'-@#+,$%' )*(1 )*',%3 :,++#$'+>, +(:,A 2.($# *,-'-%,$5# #!!?.-.*# ,4 ,!,"#%( *,$4':,$%(; B,* =.#$%( *'&.#*4# '$",+, &!' -%*#%' -#+*'/+#!'9 ,--' 4,"($( )(--,4,*, 2.(1 $, )*()*',%3 :,++#$'+>, C2.($# #4,-'($, , 2#--' -%*,-- *,-'4.'D ),* ,"'%#*, 4,!#:'$#5'($' ( *(%%.*, 4,! 4'-)(-'%'"(; E, -(-%#$5, +>':'+>, .%'!'55#%, ),* ,!':'$#*, &!' -%*#%' -#+*'/+#!' 4,"($( )(--,4,*, .$?,++,!!,$%, -,!,%%'"'%3 4' #%%#++( C,--,*, '$ &*#4( 4' #%%#++#*, !( -%*#%( -#+*'/+#!, -,$5# #))(*%#*, :(1 4'/+>, # =.,!!( -%*.%%.*#!,D9 +#*#%%,*'-%'+>, 4' +(**,%%# "'-+(-'%3 , #4,&.#%# %,$-'($, -.),*/+'#!,; :#%,*'#!' +(:.$,:,$%, .%'!'55#%' $,!!# !"#$%& '(%")'$%*(+(+, +>, -($( #$+>, +(:)#%'2'!' +($ ' +'*+.'%' '$%,&*#%' -($(A -'!'+'( )(!'+*'-%#!!'$( C:#%,*'#!, -%*.%%.*#!,D , (--'4( 4' -'!'+'( C:#%,*'#!, -#+*'/+#!,D 4,)(-'%#%' +($ !# %,+$'+# EBFGH C-). /"& !"& 0*&'(%$1 2$3)" 4&3) (5()+D9 '$ +.' !# *':(5'($, 4,!!?(--'4( #""',$, '$ .$# -(!.1 5'($, 4' HF; I),--( "',$, .%'!'55#%( '! $'%*.*( 4' -'!'+'( +(:, :#%,*'#!, '-(!#$%,6J8K $'%*.*( 4' -'!'+'( +(:, :#%,*'#!, -%*.%%.*#!, , -'!'+'( )(!'+*'-%#!!'$( +(:, :#%,*'#!, -#+*'/+#!,; B,* !# *':(5'($, 4' -'!'+'( )(!'+*'-%#!!'$( -' .%'!'51 5#$( -(!",$%' #$'-(%*()' +(:, KOH , EPD6J8K %.$&-%,$( , (--'4( 4' -'!'+'( 4,)(-%' +($ !# %,+$'+# FGH 4(", '! %.$&1 -%,$( 0 '! :#%,*'#!, -%*.%%.*#!, , !?(--'4( =.,!!( -#+*'/+#!, +>, #$+(*# .$# "(!%# "',$, *':(--( +($ .$# -(!.5'($, 4' HF6J8; B,* =.,-%( !#"(*( 4' %,-' '! :#%,*'#!, +>, ),*L *'+()*, :#&&'(*, ':)(*%#$1 5# 0 '! I'!'+'(1M,*:#$'( )(!'+*'-%#!!'$(9 ( -,:)!'+,:,$%, 3)1678(9&9 =.,-%( 7

(7)

!"#$%!&# '! "(""# &# )!$!""#$%*"%)'# )'% %)'# # +*%)'# !,#-(!"# .#$ ./"#$ #*0 *#$# % .%#-!"/ )/ # !"#$%!&# *"$(""($!&# .#$ 12134 56/&"$#7 /&"$# !, #**#$# )/ .!"%8%&# )/6 &! !"#$ %"&!'!'( ,#% )%$)(%"% %6"#-$!"%7 ./**%#,# %& .$#-%/ ,% ./"#$ #**#$# .$/)#**!"/ ! 8!**# "# .#$!"($#4

9! ,#./*%:%/6# ! "# .#$!"($# 8!**# ,% )(% -/,# %& )$*+,-!./ )/6*#6"# &! .$/0 ,(:%/6#7 )/6 &! "#)6%)! ,% 01#2%"/ !"#$ %"&!'!'(7 ,% ,%*./*%"%;% 1213 *( )%$)(%"% <1=3 .$##*%*"#6#"% *#6:! %6"$/,($$# % ./$"!6"% ;!$%!:%/6% / ,!66#-0 -%! #6"% !&&# %6"#$)/66#**%/6% #"!&&%)'# ,% )(% *% )/ ./6#> $#6,# ./**%8%&# &! ?!88$%)!:%/6# ,% ,%*./*%"%;% <1=3 )/ .!"%8%&%4 @(#*"! )!$!""#$%*"%)! ?! ,#& )$*+,-!./ (6 !"#$%!&# #*"$# ! #6"# %6"#$#**!6"# .#$ &! ?!88$%)!:%/6# ,% 1213 # )/ # ;#,$# / ,% A%/12134

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

9! ./**%8%&%"K ,% ("%&%::!$# %& )$*+,-!./ )/ # !"#$%!&# *"$(""($!&# # % .$/8&# % ,% 03!"3!$' ,#&&# *"$(""($# */*.#*# */6/ !$-/ #6"% )'# ;#$$!66/ $%.$#*% 6#& *#)/6,/ )!.%"/&/4

!" #$%&'&(

@(#*"/ &!;/$/ ,% "#*% L ;/&"/ !&&/ *"(,%/ .#$ &! $#!&%::!:%/6# ,% (6 1213 .#$ !..&%)!:%/6% 8%/&/-%)'#4 M#$ ./"#$ )/ .$#,#$# &# $!-%/6% )'# *.%6-/6/ !&&! $#!&%::!:%/6# ,% ,%*./*%"%;% ,% D(#*"/ "%./ # D(!&% */6/ % ,%*./*%"%;% A%/1213 !""(!& #6"# %6 (*/ *#-(# (6! 8$#;# )!$$#&&!"! ! "!&# .$/./*%"/4

(8)

!" #!$%&'! (&)*+*, - $.//0&12) 1' 3.2#) &'2&!%! 4& %&/$)2&2#!%& 5!$ .56 5"&/.7&)'& 8&)%!4&/0! ) 8&)")9&/0! ." :'! 4& %&9"&)$.$! ". 3&#. 1%.'. ! ";.26 2&2#!'7. 2.'&#.$&.< = (&)*+*,>?@ 5)22)') !22!$! 4!:'&#& /)%! 4&25)2&#&3& ) 2&2#!%& $!."&77.#& %!4&.'#! #!/'&/0! 4& %&/$)6A.88$&/.7&)'! ! %&/$)".3)$.7&)'! ! 4!2#&'.#& ."". %.'&5)".7&)'!B ."";.'."&2&B ) ."". $!.7&)'! /)'#$)"".#. 4& !'#&#C 8&)")9&/0! ) /0&%&/0!<

D1!2#& 4&25)2&#&3& /)%5$!'4)') #1##! "! &'#!$A.//! A$. 2/&!'7! 8&)")9&/0! ! 4&2/&5"&'! 8&)%!4&/0! ! 2&2#!%& 21 2/.". %&/$)%!#$&/.<

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

F&91$. G<HI J55"&/.7&)'& (&)*+*,<

= 2&2#!%& %&/$)6!"!##$)%!//.'&/& 5!$ .55"&/.7&)'& %!4&/0! ! 8&)")9&/0! 3!'6 9)') .##1."%!'#! /)'2&4!$.#& 1';.$!. 4& 2&9'&:/.'#! &%5.##) &' K1.'#) ";&'6

(9)

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

C('(!.),(' ( 0('+"'" $ &)&%%. ( !( *).33& #& ,. (!&.)& 2(! ). -.//!&*.%&"'( #& D&"EFEG6

,. (!&.)& &2&*& #()). ,&*!"()( !"'&*.7 *",( 3&)&*&" ( "33&#" #& 3&)&*&"H ,. (!&.)& 2).3 &*& " 2")&,(!& *",( &) I")&#&,( &)3&).'" JIKEGL6 $ &)&%1

%. & 2(! ). 2!"#$%&"'( #& 3&3 (,& ,&*!"M$&#&*& 2(!*5N '"' #&32('#&"3&7 -.*&),(' ( &' (+!./&)& *"' ,. (!&.)& -$'%&"'.)& ( 2(!*5N .$,(' .'" ). /&"*",2. &/&)& 4H

,. (!&.)& ( (' & 4 /&")"+&*5(7 *",( (33$ & *())$)( ( 2!" (&'(6 !.22!(3('1 .'" '$"0( (**& .' & 2"33&/&)& 4 '() *.,2" #())( /&" (*'")"+&( ( '.'"1 (*'")"+&( &'32&!. ( .))( *())$)( ( .& (33$ & /&")"+&*&8

> D&"EFEG 3")& .,(' ( 3"'" *",2"3 & #. 3('3"!&7 . $. "!&7 3 !$ $!( ,(*1 *.'&*5( (# ()( !"'&*5( ( +('(!.),(' ( 0('+"'" !(.)&%%. & &' 3&)&*&"8

O$(3 & #&32"3& &0& 2"33"'" (33(!( *. .)"+. & $ &)&%%.'#" #&0(!3& *!& (!&H ). #&<(!('%. 2&= 3(,2)&*( ( &,,(#&. . 2$P (33(!( (<( $. . 3$)). /.3( #())( "2(!.%&"'& *5( *",2&(8

Q'. 3$##&0&3&"'( ,.*!"3*"2&*. 2!(0(#( ). #&3 &'%&"'( &' #$( 2!&'*&2.)& *.1 (+"!&(6 D&"EFEG ! " #$% ( D&"EFEG ! " "%?RSA8 > #&32"3& &0& ! " #$%

(10)

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

!"! #$%&'&( )*+ ,- .$-/0%1$

J" )("*#$.( !"''!+.+# " (0 .+*&+# $ )( "''0(%"3($#+ 8($9:9; )( &"**($!+ (# +!+..+ +) (0 %"&'$ )( !(%+!%" .(%,!"&+# + '(K "&'($6 G+*0( ,0 (&( "##( L . " $ .4(0,''" $ ,# #,&+!$ .+&'!+ &"**($!+ )( )(.'$.( (4( 8($9:9;ABMC6 N,+. ( )(.'$.( (4( )(O+!(.%$#$ !" 0$!$ #$# .$0$ '+! 0+ +%#(%?+ )( 5"<<!(%"3($#+ &" "#%?+ '+! 0+ "''0(%"3($#( " %,( 4+#*$#$ )+. (#" (6 P$.Q %$&+ 0" .%(+#3" + 0" +%#$0$*(" .( .4(0,''"#$ #+*0( "##(/ "#%?+ 0" )("*#$.( %$# (#," " '!$*!+)(!+R " ,"0&+# + &$0 + !(%+!%?+ .$#$ 4$0 + "00$ .4(0,''$ )( . !,&+# ( '+! )("*#$.( '+!.$#"0(33" +6 %$# "0 " .+#.(<(0( E +) (# *!")$ )( (#)(4(),"!+ 5"%(0&+# + 0+ &"0" (+6 S!(&" )+00="44+# $ )+00" <($ +%#$0$*(" #+0 .+ $!+ 5"!&"%+, (%$/ *0( .%(+#3(" ( (&'(+*"4"#$ #,&+!$.( "##( '+! ()+# (>%"!+ &$0+%$0+ )( .(# +.( %?(&(%" "4+# ( ,# '$ +#3("0+ +O+ $ %,!" (4$ + '+! $ +#+!+ ,#" &$0+%$0" '$ +#3("0&+# + +T%"%+ )" "44("!+ "00" .'+!(&+# "3($#+6 P$# (0 .$'!"**(,#*+!+ )+00+ &$)+!#+ <($ +%#$0$*(+/ ( !(%+!%" $!( .( "44"0*$#$ )+00" %$&'!+#.($#+ )+( &+%%"#(.&( <($0$*(%( %?+ *$4+!#"#$ 0+ 4"!(+ &"0" (+ + )+00+ <"#%?+ )" ( *+#+ (%?+ '+! (#)(4(),"!+ &$0 $ '(K !"'()"&+# + &$0+%$0+ +T%"%( '+! 0" %,!"D %(U '$! " ") ,# (#%!+&+# $ #+00" '!$),3($#+ )( #,$4( + '(K +T%"%( 5"!&"%(6

(11)

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

(12)

!"!#$%&! '!""(")*!+ ,$-$ $%&! ,$ '!""("!+ .(*$/')#$%&! )&)"$0$') ! *$"!-)1!&0% 1%"!'%")*!2

30$"$##)&,% ") 0!'&%"%4$) 5657 8 .% $9$"! $ %")*! $&4%"! '!""("!+ :;<+ =;<+ -$*( + .*%0!$&!+ 1$'*%%*4)&$ 1$ ! 9$%1%"!'%"! ,$ .$''%"! ,$1!& $%&$ ("> ") 9) ! ,!""! "%*% ')*)00!*$ 0$'?! / $'?! ! ,!""! .*%.*$!0@ '?$1$'?! A*) (&B)1.$) .%.%")#$%&! ,$ '!""("! !0!*%4!&!!2 C! 0*(00(*! 5657 9) )0! ( A!&%1!&$ '%1! $,*%,$&)1$')+ %.0%>,$&)1$')+ !"!00*%A%*! $ ! '$&!0$') -!&4%&% (0$"$##)0$ ) 0)"! '%.%2

D ,$ .% $0$-$ '?! $ %''(.)&% ,!"") '$ $%&! '!""(")*! *$'?$!,%&% -!"%'$0@+ !> "!00$-$0@ ! $&0!4*)#$%&! '%& )"0*$ ,$ .% $0$-$ 1$'*%E($,$'$2 D&%"0*!+ (&) -%"0) '?! "! '!""("! (9$ '%&% ") '$ $%&!+ .!* )**$''?$*! "B)&)"$ $ 1%"!'%")*! 9$ %4&) !F!00()*! (&) G)1."$/')#$%&!H ,!" !4&)"! '!""(")*!+ '%1! )--$!&! ), ! !1.$% (0$"$##)&,% ") IJ= .!* $" :;<KLLM2

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

3& ! !1.$% ,$ *$"!-)1!&0% !"!00*$'% 8 *)..*! !&0)0% ,)$ N$%5657 '?! (0$> "$##)&% $ !& %*$ !"!00*%'?$1$'$+ P(! 0$ !& %*$ .% %&% ! !*! (,,$-$ $ $& 0*! 4*(..$O 9$% !& %*$ )1.!*%1!0*$'$+ 9$% !& %*$ .%0!&#$%1!0*$'$ ! 9$% !& %*$ ').)'$0$-$2

(13)

! "#!$%&'()*+ )""(,! -(+*+ (*-+,+ .#+-!/+*"+0+*"+ &$!"! (* 1()/)2(!3 "!/+ "+,*(,! $( 1!$! $&//! 4&)#+$,+*'!3 $( &"(/(''!*) 5&(*%( %+( 0!#,!")#( 4&)#+$6 ,+*"( 7 !"# 8 ,9+ +0+"")*) /&,+ (* ,)##($.)*%+*'! %( &*! $.+,(:,! /&*29+''! %;)*%! <=>3 =?@3 ) $&//! /&0(*+$,+*'! ,9(0(,!3 /! 5&!/+ ,)*$($"+ *+//;+0($$()*+ %( /&,+ (* ,)##($.)*%+*'! %( &*! .+#%("! %( 5&!*"("A %( +*+#2(! (* $+2&(") !% &*! !--+*&"! #+!'()*+<=B@C

D+# 5&!*") #(2&!#%! (*-+,+ (/ #(/+-!0+*") %( "(.) 0+,,!*(,) +$($")*) %(-+#$+ $"#&""&#+ ,)0+ $%&'(&!)*% #+#' <=E3 =F3 =G@ + %(!H#!00(3 *+/ ,!$) %+/ &!), *% #+#' (/ #(/+-!0+*") .&I !--+*(#+ 0!*(+#! $"!"(,! )..&#+ %(*!0(,!3 0($&6 #!*%) #($.+""(-!0+*"+ 2/( $"#+$$ ! ,&( J $)"").)$") ) /! -!#(!'()*+ %( 0!$$! ,9+ $&1($,+C

K+/ ,!$) (* ,&( $( 0($&#(*) 2/( $"#+$$<=G@3 /! #+!'()*+ 1(),9(0(,! !--(+*+ $)/) $& &* /!") %+/ &!)*% #+#'3 L(2&#!=CB 3 &*! -!#(!'()*+ %+//;+*+#2(! /(1+#! .#)-)6 ,! &*! -!#(!'()*+ %+2/( $"#+$$ $&.+#:,(!/( ,9+ -+*2)*) #(/+-!"( 0($&#!*%) /! %+4+$$()*+ %+/ &!)*% #+#' $"+$$)C ! 0($&#! %+//! %+4+$$()*+ %+/ &!)*% #+#' .&I +$$+#+ ,)0.(&"! ,)* $"#&0+*"( )""(,( )..&#+ ,)* $"#&0+*"( +/+""#(,(C M/ :*+ %( !&0+*"!#+ /! $+*$(1(/("A %+//) $"#+$$ J *+,+$$!#() %(0(*&(#+ /! ,)$"!*"+ +/!$"(,! %+/ 0!"+#(!/+ ,)* ,&( -(+*+ #+!/(''!") (/ &!)*% #+#' 0+*"#+ /! /!#29+''! %+/ &!)*% #+#' $"+$$) %+"+#0(*! (/ *&0+#) %( 1()0)/+,)/+ ,9+ .)$$)*) !%+#(#+ (* $&.+#:,(+C L(2&#! =CBN O(/+-!0+*") %( $"#+$$<=F@C K+/ ,!$) (* ,&( (*-+,+ (/ #(/+-!0+*") !--+*2! 0($&#!*%) /! -!#(!'()*+ %+//! =P

(14)

!""!#$%& $'(& )*+,-! $./& *0 !"#$%&'&( 1*232 244*5!56 244!3*4! 2352 *3 67 86 492 "* *332"49* ,3:6"4*00!;*632 !8 ,3! 8252- *3!5! <-2=,23;! ><-2=,23;! 8* -*"63!3;!?. @! <-2=,23;! 8* -*"63!3;! A,B 2""2-2 *",-!5! "*! A2- 2;;* 655*4* 492 20255-*4*C =,!386 !11*232 0:!82"*632 82002 D*6 6024602 ",0 !"#$%&'&( "* 9! ,3! 1!-*!;*632 8200! !""! 820 !"#$%&'&( 282"* 6& 2 8* 463"2+,23;! ,3! 1!-*!;*632 8200! <-2=,23;! 8* -*"63!3;!E 0! *",-! 8200! 1!-*!;*632 8* !""! !11*232 *",-!386 0! 1!-*!;*632 8200! <-2=,23;! 8* -*"63!3;!.

F0 5*A6 8* -*021! 2356 !AA23! 82"4-*556 A-2"235! 06 "52""6 A-*34*A*6 8* <,3;*67 3! 2356 !8655!56 32* -*",63!56-* 492 12--!336 ! A*! 2352 82"4-*55* 320 "27 46386 4!A*5606C * 8255!+0* ", 46 2 <-2=,23;! 2 !""! "636 02+!5* 2 02 +-!382;;2 ", 4,* !+*-2 A2- A652- 655232-2 ,3 !, 2356 8* "23"*D*0*5G "636 -* !38!5* !0 "246386 4!A*5606.

F0 -*021! 2356 8* !""!& 46"H 46 2 =,2006 8* "5-2""& "636 %!)&%*+(&&E 0! *",-! 8* IJK 2 8* A-652*32 !11*232 =,*38* *3 !3*2-! 8*-255!.

)*+,-! $./E L*021! 2356 8* !""!#$%(.

M-! * N*6OPOQ 492 "* 644,A!36 8* *",-!-2 A!-! 25-* R"*606+*4* >52 A2-!5,7 -!& A-2""*632& D!55*56 4!-8*!46 244? S A6""*D*02 -*46-8!-2 * "23"6-* 8* A-2""*632 4!-8*61!"460!-*#$T(.

@! !++*6- A!-52 82* N*6OPOQ A2- !AA0*4!;*63* 52-!A2,5*492 -*235-!36 3200! 4!52+6-*! 82* N*6OPOQ A2- !AA0*4!;*63* $" '$#(,.

(15)

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

H#'$(/&(4%! * /%&2)!"#'+# 2'( $#% &!/% #"B-#"!+%&% %' &2% /% (++#'1('( .!'5 +!11% /(/+!',%!-% 4#) -# %'$!1%'% "#$%&<# 1!/+)(%'+#/+%'!-%0 1)!,%# !--! "%&)(5 =!BB)%&!,%('# * /+!+( 4(//%B%-# )#!-%,,!)# &!4/2-#CEGF !"#$#%% &!)!++#)%,,!+# $! ;I0 2'%+A !"#$#%% $% +)!/"%//%('# $#--# %""!1%'% # /%/+#"% $% &('+)(--( #-#++)('%&%6

H%'1#1'#)%! $#% +#//2+% )!44)#/#'+! 2' )#4!)+( "(-+( %"4()+!'+# #$ %"4#5 1'!+%.( 4#) -! )%&#)&!0 /% 4)#(&&24! $% !44-%&!)# % 4)%'&%4% %'1#1'#)%/+%&% !--! /&%#',! $#- &()4( 2"!'( !++)!.#)/( -( /.%-244( $% ()1!'% 4#) -! /(/+%+2,%('#0 %- )%4)%/+%'( ( -! &('/#).!,%('# $% !-&2'# =2',%('!-%+A6

J' 1)!' '2"#)( $% $%/4(/%+%.% #-#++)('%&% %"4%!'+!B%-% /('( B!/!+% /2 $%/4(5 /%+%.% :;:70 %'&-2/% /#'/()%0 &!4/2-# # &!'"(')!*6

J' #/#"4%( -!"4!'+# $% >2#/+( +%4( $% !44-%&!,%('# /('( -# /('$# '#2)!-%0 +!-% /('$# <!''( -( /&(4( $% =()'%)# /+%"(-% #-#++)%&% 4#) )%4)%/+%'!)# -# =2',%('% $#--# ,('# $!''#11%!+# ( $%/!B%-%+!+# $#- /%/+#"! '#).(/(6 ! -(&!-%,,!,%('# $% >2#/+% /+%"(-% * #/+)#"!"#'+# %"4()+!'+# 4#) )%2/&%)# !$ (++#'#)# %- )%/2-+!+( $#/%$#)!+(6 ! "%'%!+2)%,,!,%('# $% /('$# '#2)!-% %'+#1)!+# &(' -! &%)&2%+#)%! 4#) -H!"4-%3&!,%('#0 %- &+$,!*$#-!./0 %- )%-#.!"#'+( $% 4%&&<% # %- /%/+#"! $%

(16)

!"#$%##%&'( !"#$#%% )% *& ('+" ( )% )" % # " ",(-&."')& ." !(".%++"+%&'( )% #&')( *(! "**.%/"+%&'% '(0!&.&,%/1( 23456

7'8". !" %$*&! "' ( "**.%/"+%&'( 9 !"**!(#(' " " )".." !( %'" "! %:/%".( %' #%.%/%&; -&. " " $%,.%&!"!( ." -%# " )(% '&' -()(' %< =0(# % %$*%"' % # %$&."'& .( /(..0.( '(!-&#(; $%$"')& %. /&$*&! "$(' & )% =0(..( /(..0.( /1( #% &//0*"'& )(.." >& &!(/(+%&'( ( *!&)0/(')& =0%')% 0'" #('#"+%&'( -%#%-" ". /(!-(..& 24?; 4@56

A8%' (!(##( '(..& #>!0 "!( % BCBD ( .( (/'&.&,%( )% $%/!&>"EE!%/"+%&'( *(! "**.%/"+%&'% !& '!'( 9 %' /&' %'0" /!(#/% "F .( (/'%/1( 0 %.%++" ( %' $%/!&(.( G !&'%/" >&!'%#/&'& $",,%&!( 0'%>&!$% H ( !%*!&)0/%E%.% H '(.." !(".%++"+%&'( )% #%# ($% %$*%"' "E%.% !%#*( & "..( (/'%/1( " 0".$(' ( )%#*&'%E%.% '(..( %')0# !%( E%&$()%/1( ( >"!$"/(0 %/1(6

!"! !" #$%&'&( )*+ ,-%)$ .*+/)*0.$-$

I0(# & %*& )% "**.%/"+%&'( !%,0"!)" #%" J%&BCBD !& '!'( /1( J%&BCBD !& '!)"(6

B" (!%".% /&$( *&.%$(!% KLBBM; LNBM; #&. ,(.O ( $" (!%".% *."# %/% !%G /&*!&'& 0' !0&.& >&')"$(' ".( *(! % #%# ($% )% E%&"'".%#%F % J%&BCBD #&'& "'/1( %$*&! "' % # !0$(' % )% "'".%#% )% #%',&.( /(..0.( ( )% # 0)%& )(..( .&!& " G %-% H %' ($*& !(".(6 P )%#*&#% %-% *(! &!,"'% "! %:/%".%24?5 #&'& 0' ."$*"' ( (#($*%& )% "**.%/"+%&'( !& '!'(6

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

(17)

!"#$%$&' ()* +,--*..,/, $ 0102 3$ ".$4* $/ &*5+$ #4*6$ * -,&&, (,/3$7$,/$ 8-$,%,.$()* 4$%*6"/&$9 :/$&" "%%" +,--$#$%$&' 3$ ;,4/$4* -&$5,%$ *%*&&4$($ , 3$ *4,< ."4* -,-&"/7* 5*3$($/"%$ /* ;" $ ("/3$3"&$ $3*"%$ +*4 %" 4*"%$77"7$,/* 3$ -$-&*5$ :&$%$ "% 5$.%$,4"5*/&, 3*%%!"--$-&*/7" -"/$&"4$"=

>*4 +4*6*/$4* :/" 5"%"&&$" ? $5+,4&"/&* $3*/&$8("4* @:*%%* #$,5,%*(,%* ()* 4$(,+4,/, :/ 4:,%, ;,/3"5*/&"%* "%%!$/&*4/, 3$ :/" 5"%"&&$" *3 $ (,5+,< /*/&$ ()$5$($ ()* +,--,/, $/&*4".$4* (,/ %* -:33*&&* #$,5,%*(,%* +*4 ,&< &*/*4* *A*&&$ (:4"&$6$= B &"%* -(,+, -,/, -&"&$ ;"##4$("&$ !"#$%##%& 3$ CDBEFG9 FHI9 !"#$%##%& 3$ +4,&*$/*EFHI9 %##%& 3$ 5$(4,<*%*&&4,3$EFG9 FHI * -$-&*5$ 3$ 5,/$&,4"..$, 3*%%!$#4$3$77"7$,/* 3*% CDBEFG9 FH9 JI=

K/ "%&4, "-+*&&, 3" /,/ -,&&,6"%:&"4* -,/, $ &*-& 3" %"#,4"&,4$, +*4 %" 4$(*4(" 3$ ;"45"($ * .%$ *A*&&$ ()* &"%$ -,-&"/7* +4,6,("/, -:.%$ ,4."/$-5$ 6$6*/&$ L!' (!($M * -:%%* (*%%:%* L!' (!)#$MN -,/, -&"&$ -6$%:++"&$ " @:*-&, +4,+,-$&, -&4:&&:4* 5$(4,<O:$3$()*EJ9 FHI ("+"($ 3$ -$5:%"4* %* (,/3$7$,/$ "5#$*/&"%$ P !' (!($Q * #$,-*/-,4$ " #"-* (*%%:%"4*EFG9 FRIEFG9 FRI=

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

W 5$(4,3$-+,-$&$6$ +,--,/, 5$.%$,4"4* %" &*4"+$" ;"45"(*:&$(" $/ @:"/&, (,/< -*/&,/, :/ 3,-"..$, +4*($-, *3 :/" -,55$/$-&4"7$,/* /,/ $/6"-$6" * 5*/, 3,%,4,-"=

" &*(/,%,.$" 0102 )" ;,4/$&, :/ 6"%$3, -&4:5*/&, +*4 %" ;"##4$("7$,/* 3$ 3$-+,-$&$6$ ("+"($ 3$ (,/&4,%%"4* (,/ +4*($-$,/* $% 3,-"..$, * 3$ %,("%$77"4* %* 7,/* 3$ -,55$/$-&4"7$,/*= X:*-&$ 3$-+,-$&$6$ -,/, 4"++4*-*/&"&$ 3" 5$(4,< ".)$9 5$(4,<("+-:%* * 5$(4,+"4&$(*%%*=

!:/$,/* 3$ -*/-,4$ $/ .4"3, 3$ 4$%*6"4* (,/3$7$,/$ 5*3$()* 4$%*6"/&$ /*% +"7$*/&* L"3 *-*5+$, -*/-,4$ 3$ +UM9 3$ 3$-+,-$&$6$ $/ .4"3, 3$ (,/&*/*4* ;"45"($ L5$<

(18)

!" #$%&'( " !"#$#%&%'$!#) ( *+%$"%+,+-+ +. /!#*" *+ +.+(,,#!( '( %"%,#.0( &!#,+-( 12+ !"3#/4+) *#.." -+,# # %+%,(2+ "2$'(,+ 2(/'+" "."% +&,+ "2( (#)* (%+!'%#,-5 6+"7879 %+ :#%#." %&''# "2:+.#0+".( *+ %"%,#.0( "!/#.+ 4( ( +."!/#.+ 4( #' ;.( *+ !(#!( %+%,(2+ :+"<&.0+".#'+ $(! #.#'+%+ !. '!/#$ ( %+%,(2+ :+"2+2(,+ + ( :+" "2$#,+:+'+ $(! '=+2$'#.,"'"/+# !. '!'$> ?&(%," @ !#//+&./+:+'( #--#'(.3 *"%+ *(''# <&.0+".#'+00#0+".( "!/#.+ #A

!" #$%&'(%)*'&&)&'(%+

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

Q# <&.0+".#'+00#0+".(HIRK *(''( %&$(!; + %"'+*( ( '=&,+'+00" *+ 2"*+; #,"!+ "!3 /#.+ + !+/&#!*#." +' $!" (%%" *+ *($"%+0+".( *+ %,!#,+ "!/#.+ + 2"'( "'#!+ ( *+ :+"2"'( "'( %&''( %&$(!; + *+ %(2+ ".*&,,"!+> 2(,#''+ ( 2#,(!+#'+ +%"'#.,+A 5' 2",+-" 4( %$+./( #''# *($"%+0+".( *+ %,!#,+ "!/#.+ + %& %&$(!; + %"'+*( @ '(/#," #' *(%+*(!+" *+ &.+!( "2$".(.,+ "!/#.+ + ( +."!/#.+ + $(! !(#'+00#!( .&"-+ 2#,(!+#'+ .(''=",,+ # *+ &. $+S #2$+" %$(,,!" *+ #$$'+ #0+".+A

(19)

! "#$%&''$ () (&"$')*)$+& () ',#-,) .$!&%$!-#) )+ /-'& !)01)(- ') 2-'- '1!!3-1,$4 -''&.2!-55)$ 6 !"#$% !&'"()*789: () .$!&%$!&;<=> <?@A B1&',$ "#$%&''$ '/#1,4 ,- !- %-"-%),C %D& "$'')&($+$ (&,&#.)+-,& .$!&%$!&> %$.& ) ')!-+)> () -,,-%4 %-#') - '12',#-,) '$!)() /$#.-+($ !&5-.) %D).)%) /$#,)A + 01&',$ %-'$ '& ') ).4 .&#5& 1+ .-,&#)-!& '$!)($ )+ 1+- '$!1*)$+& %$+,&+&+,& .$!&%$!&> ,-!) .$!&%$!& ') !&5-+$ -! '12',#-,$ /$#.-+($ '1 () &''$ 1+$ $ ")E ',#-,) .$!&%$!-#)A

8,#-,) .$!&%$!-#) &',#&.-.&+,& ',-2)!)> "#&"-#-,) .&()-+,& )! .&,$($ (&!!3-1,$4 -''&.2!-55)$> D-++$ ,#$F-,$ -""!)%-*)$+) )+ F-#) ')',&.) () #)!&F-.&+,$ %$.& 01&!!$ &!&,,#$%D).)%$ & )! #)!&F-.&+,$ $,,)%$A

.$+$',#-,) -1,$-''&.2!-,) 68&!/4-''&.2!&( .$+$!-G&#789H: '$+$> 01)+()> ')+5$!) ',#-,) $#5-+)%) %D).)%-.&+,& -''$#2),) %D& ') /$#.-+$ '1 '12',#-,) '$!)() 5#-*)& -!!3$#5-+)**-*)$+& '"$+,-+&- (&!!& .$!&%$!&A

/&+$.&+) '1"&#I%)-!)> %$.& 01&!!$ -""&+- (&'%#),,$> %$',),1)'%$+$ 1+ %-."$ () #)%&#%- -,,)F$ +&5!) 1!,).) -++)A

J#$%&'') %$.& %#&'%),- &"),-'')-!&> (&"$')*)$+& )+ /-'& %D).)%-> !+,-()*> $'4 ')(-*)$+& & "-'')F-*)$+&;<K@> %D& '$+$ %$.1+&.&+,& 1'-,& +&!!& )+(1',#)& () .)%#$&!&,,#$+)%-> %$)+F$!5$+$ "#$%&'') %D).)%) & I')%) %D& ') F&#)I%-+$ '1!!-'1"&#I%)& (&! L-/&# (&! '&.)%$+(1,,$#&A

B1&',) '$+$ ) .$,)F) %D& '")+5$+$ ) #)%&#%-,$#) -!!$ ',1()$ '&."#& ")E -""#$4 /$+(),$ () %D).)%- '1"&#I%)-!& & (&) /&+$.&+) I')%) %D& !- 5$F&#+-+$A

M3)."$#,-+*- %D& #)%$"#& !- %D).)%- '1"&#I%)-!& - !)F&!!$ -,$.)%$ N .&'4 '- )+ &F)(&+*- +&! %#&'%&+,& %-."$ (&!!- /1+*)$+-!)**-*)$+& $#5-+)%- (&) '&.)%$+(1,,$#)A

M- /1+*)$+-!)**-*)$+& $#5-+)%- N )! "#$%&''$ .&()-+,& )! 01-!& N "$'')2)!& )..$2)!)**-#& '1!!- '1"&#I%)& () 1+ .-,&#)-!& -!!$ ',-,$ '$!)($> )+ "-#,)%$!-#& 01&!!- () 1+ '&.)%$+(1,,$#&> '$',-+*& $#5-+)%D& & 2)$.$!&%$!& %$.& OP9 & "#$,&)+&A M3)..$2)!)**-*)$+& "1Q -FF&+)#& )+ ()F&#') .$()7

,#-.),& !3-''$#2).&+,$ ()#&,,$ (&) .&()-,$#) 2)$!$5)%) '1!!- '1"&#I%)& (&! '&.)%$+(1,,$#&R

(20)

!"#$ % &'$##()$&$**"*$(+% $+ ,!(--$#$ . /%&&" -0,%!12$%3 2(#% -022%/% +%& 2"-( /$ ,(&$#%!$4

!"#$ % &%5"#$ 2(6"&%+ $ -0&&( - !" ( /%$ ,(&$#%!$4 0 $&$**"+/( -$- %#$ /$ 2" 0!" 27$#$2$3 )$(27$#$2$8

9 !"6%!-( &" -$+ %-$ 27$#$2" % &" :0+*$(+"&$**"*$(+% )$(&(5$2" ; ,(--$)$&% $#< #()$&$**"!% 0+ 5!"+ +0#%!( /$ )$(#(&%2(&%8 =" -%+-$)$&$ . % &" -%&% $6$ . /%& /$-,(-$ $6( !$-0& "+ % /$,%+/(+( $+ &"!5" #$-0!" /"&&% 2"!" %!$- $27% - !0 < 0!"&$ % :0+*$(+"&$ /%&&" )$(#(&%2(&" % /"& #%/$" (!% )$(&(5$2( 0 $&$**" (8 =" )(+ . /%&&" !$2(,%! 0!" -0,%!12$"&% /$,%+/% $& &"!5" ,"! % /"&&'(!$%+ "*$(+% % /"&&'(#(5%+%$ . /%&&( - !" ( #(&%2(&"!% 27% :0+5% /" #%/$" (!%8

!"! #$%&'$

='"/%-$(+% /$ #(/$12" (!$ -0,%!12$"&$3 2(#% 5&$ (!5"+(-$&"+$3 "&&% -0,%!12$ ; $& ,!$#( ,"--( +%& ,!(2%--( /$ $##()$&$**"*$(+% /$ #(&%2(&% -0&&% -0,%!12$ % >0$+/$ ; "+27% 0+" :"-% 2!02$"&%8 ?$ -%50$ ( 6$%+% !$,(! " " 0+" )!%6% /%-2!$*$(+% /%&&% #(&%2(&% )$:0*$(+"&$ 0 $&$**" % 2(#% #(/$12" (!$ -0,%!12$"&$@ -$&"+$8

=% #(&%2(&% (!5"+$27% ,$A -%#,&$2$ -(+( 2(- $ 0$ % /" $/!(2"!)0!$ 2"!" %!$*< *" $ /" -$+5(&$ &%5"#$ :!" " (#$ /$ $/!(5%+( BHC % " (#$ /$ 2"!)(+$( BCC@ "&2"+$8 ='" (#( /$ 2"!)(+$( 7" " /$-,(-$*$(+% >0" !( -$ $ /$ &%5"#%3 +%& 2"-( /$ 2" %+% /$ 2"!)(+$( % $/!(5%+( 5&$ " (#$ ,$A %- %!+$ ,(--(+( &%5"!-$ " !% " (#$ /$ $/!(5%+( B CH3< @ #% $&%C #%+ !% >0%&&$ ,$A $+ %!+$ 7"++( "

/$-,(-$*$(+% -(&( /0% -$ $ &$)%!$ ,%! :(!#"!% 0+ 5!0,,( #% $&%+% B<CH2<C8

D%& 2"-( $+ 20$ -$ /%-$/%!$ 0+" #(&%2(&" $+ 5!"/( /$ !%"5$!% 2(+ "& !% )$(#(&%2(&%3 -(- "+*% ( -0,%!12$ $& 5!0,,( #% $&$2( 6$%+% -(- $ 0$ ( "/ %-%#,$( 2(+ 0+ $(&( B5!0,,( <SHC 3 >0%- % #(&%2(&% ,!%+/(+( $& +(#% /$ "&2"+( $(&$ +(!#"&$8 E&$ (!5"+(-$&"+$FGH3 GIJ $+6%2%3 ,0! )"-"+/(-$ -0&&( - %--( ,!$+2$,$(3 -$ /$:< :%!$-2(+( /"5&$ "&2"+( $(&$ $+ >0"+ ( $ 5!0,,$ :0+*$(+"&$3 $+ 5!"/( /$ !%"5$!%

(21)

!" #$ %&'$() *+ %!"! ,(,--$(*..,-* "!" /, &" ,# ,"! 0, /, &" %*#,"! 1Si2H34 5 %*#,"* ,# !"-(,(*! /$6#* ,# ,"* '($%$"-,"! &", 0,66*!($ %-,7*#*-84 9* %$6&*-! :$"6!"! (*'!(-,-* ,# &"* -*'* /* 0!#$ !#$+ ;,7$##, <4<= %*#,"! SiH4 %*#,"!#! H3SiOH /*!#! %*#,"! H2Si(OH)2 0$-*#$ 2CH3 $-*#$ 2C2H5 0$-!%%*#$ 1>$3 CH3O2 $-!%%*#$ 2OC2H5 ?20$( ,'-!'(!'*#0$-*#/*0$-!%%*%*#,"! 1>@9>A3 C6H16O3SSi ?2,00*"!'(!'*#-(*$-!%%*%*#,"! 1B@;CA3 C9H23NO3Si ?2,00*"!'(!'*#/*0$-*#$-!%%*%*#,"! 1B@9>CA3 C7H19NOSi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

(22)

! "# $$% &''(!()% *NH2 +,-./0 % ,-1/023 4(" #& 5676 8! 4(" #& 569 :

#($%#;&;& <& =;# ;; #& >( ! "?!?#()% %#"&!%=(<&!%6

4(" #& 569@ A#"&!%=(<&!% "?!?#()%BC9D@

R′′= CH3 !!"#$ C2H5% R′= CH3 !!"#$ CH2% &'( #&)* +,(')*( ! ,, * $,,$#$

-#(+."*/( *)'( 012% 3(+."*/( *)'( 042% 5 * ."*/( *)'( 062% &'( R′′(* , '"/( *$ )78" ,)

,( ,-)77)* !$# !$#5$--$#$ '9(:# '(,( 7;$ 7)",) ') . #5)/( *$ :( &#"!!( +OH<

8< #(= <;&;% E!&<? >?< $#%)?==% >( =(<&!(FF&F(%!? : <& '%>(E)& >?< = G=;#&;% =(<&!(FF&;%3 ;&<? '%>(E)& )%!=(=;? !?<<& H&#(&F(%!? >?<<& G&"!&G(<(;I % &!* )J? !?< K%#!(#? &< = G=;#&;% <& $%==(G(<(;I >( )&;&<(FF&#? #?&F(%!( )J('()J? &<<L(!;?#K&))(& ?;?#%"?!?&3 ? !?< '%>(E)&#? <%)&<'?!;? <? = ? )&#&;;?#(=;()J?6 8< #(= <;&;% (! &==%< ;% >( '&""(%#? ('$%#;&!F& : <& )&$&)(;I >( #?!>?#? ! '&;?#(&<? (!%#"&!()% G(%<%"()&'?!;? &;;(H%6

8 =(<&!( $(M <&#"&'?!;? ;(<(FF&;( $#?=?!;&!% ! =%=;(; ;% %#"&!()% ? !% +4(" * #& 569 +N223 > ? +4(" #& 569+O22 %$$ #? ;#?+4(" #&569+,22 "# $$( (>#%<(FF&G(<(@ ( "# $$( (!>()&;( )%! R′′ (! $#?=?!F& >( &)P & =( <(G?#&!% <&=)(&!>% <L%==("?!%

<(G?#% >( #?&"(#? )%! ! &;%'% >( (>#%"?!% K%#'&!>% ! =(<&!%<% +*SiOH26 Q?< '&""(%# $&#;? >?( )&=( (! ) ( =( ?=?" ? ! ;#&;;&'?!;% >?<<& = $?#E)(?3 "<( &<)%==( +*OCH3 %$$ #? *OC2H52 >?( =(<&!( G(* % ;#(*K !F(%!&<( =( &""#?"&!%

$?# K%#'&#? =(<%==&!(@ Si*O*Si 6

R!& H%<;& )J? : &HH?! ;& <L&>?=(%!? >?<<L%#"&!%=(<&!% = <<& = $?#E)(? #?=* ;& >(=$%!(G(<? (< #&>()&<? %#"&!()% $?# <L&>?=(%!? )%H&<?!;? >( G(%'%<?)%<? % <L(!;?#&F(%!? E=()& )%! &<;#? =%=;&!F?6

!"!# $%&'())& *+ )+,-.+//-/+&.(

S& =(<&!(FF&F(%!? $ T ?==?#? ?=?" (;& = P &<=(&=( ;($% >( = $?#E)(? )J? $#?* =?!;& "# $$( (>#%==(<()( +*OH23 )%'? '()&3 H?;#% ? %==(>( '?;&<<()(BU93 CV3 CWD6

(23)

!"# $%&'#((& %)*+!%,! "! -&%.!/)&0# ,) +0 "#*!.# '&1!"#02# '3# "! .&"#'&4 "! %#!*#02# ,) ()"!0& #5#22+! '&0 "! (+$#%6')# & '&0 !"2%# .&"#'&"# ,) ()"!0) -&%.!0,& ,#) ()"&((!0)7

8" $%&'#((& ,) ()"!0)//!/)&0# &5%# "! $&(()9)")2: ,) .&,)6'!%# "! '!%!22#%)(2)4 '3# '3).)'&46()'3# ,#""# (+$#%6') ! '+) () "#*!0&; 2!"# $&(()9)")2: $+< #((#%# (-%+22!2! $#% "=)..&9)")//!/)&0# ,) 9)&.&"#'&"#7

>%).! ,) $%&(#*+)%# '&0 "! ()"!0)//!/)&0# 1#%! # $%&$%)! ,#"" (+$#%6') ? 0#'#(4 (!%)! +0! -!(# $%#").)0!%# '3# %)*+!%,! "=),%&(()"!/)&0#; & !0'3# '&.+0#.#02# ,#22! $%#$+")/)!; ,#""# (+$#%6') ,! .&,)6'!%#@ABC7 D! $%#$+")/)! '&0(#02# "! -&%.!/)&0# ,) 2#%.)0!/)&0) 4OH )0 (+$#%6')#7

D! (+$#%6')# ,#) (#.)'&0,+22&%) ? "! %#*)&0# )0 '+) () )02#%%&.$# "! $#%)&,)')2: ,#" %#2)'&"& '%)(2!"")0&E ')< '&.$&%2! "! 0!(')2! ,) ")1#"") #0#%*#2)') "&'!")//!2) $#% *") #"#22%&0)7 80 (+$#%6')# *") !2&.) 2#0,&0& ! %)&%*!0)//!%() )0 .&,& ,! .)0).)//!%# "=#0#%*)! ")9#%! ,#" ()(2#.! # ,! '&.$"#2!%# F+#) "#*!.) '3# !"2%).#02) %#(2#%#99#%& !$$#()G %)'&(2%+/)&0# (+$#%6')!"#7

D! %)'&(2%+/)&0# (+$#%6')!"# ? )" %)(+"2!2& ,#" '&.$%&.#((& '3# () %!**)+0*# -%! )" *+!,!*0& ,) #0#%*)!; '3# () &22)#0# '&0 "! -&%.!/)&0# ,) 0+&1) "#*!.); # "=#0#%*)! $#%(! ! '!+(! ,#""! 2#0()&0# (+$#%6')!"# %)(+"2!02# ,!""! 0+&1! '&06*+%!/)&0#7 H+#(2& !($#22& ? $!%2)'&"!%.#02# +2)"# $#% )" $%&'#((& ,) -+0/)&0!")//!/)&0#7

8" '&0'#22& ,) %)'&(2%+/)&0# (+$#%6')!"# 2&%0! +2)"# 0#" '!(& ,) $%#$+")/)! ,#" '!.$)&0#7 8..#%*#0,& )0 +0! (&"+/)&0#; '&02#0#02# !'F+! &(()*#0!2!; .!2#4 %)!") '&.# ()")')&; &((),& ,) ()")')& # 0#" 0&(2%& '!(& !"#$%&'(; "! %)'&(2%+/)&0# (+$#%6')!"# !11)#0# '&0 "! -&%.!/)&0# ,) *%+$$) ),%&(()")')@IJC & *%+$$) 4OH7 8 ()"!0) %)#('&0& ! %#!*)%# '&0 F+#(2) *%+$$); !22%!1#%(& ) F+!") #(() () "#*!0& '&1!"#02#.#02# !" (+9(2%!2& (#'&0,& )" $%&'#((& ,) ()"!0)//!/)&0#7

D! $%#$+")/)! ,#""# (+$#%6')# %!$$%#(#02! +0 $+02& #((#0/)!"# $#% )" $%&'#((& ,) -+0/)&0!")//!/)&0# ,) (+$#%6')G #((! 0&0 (&"& -!1&%)('# "# 2#%.)0!/)&0) 4 OH 0#'#((!%)# !K0'3L ) ()"!0) () "#*3)0& '&1!"#02#.#02#; .! ? !0'3# +2)"# $#% "=#").)0!/)&0# ,) 9+&0! $!%2# ,#""# (&(2!0/# '&02!.)0!02) $%#(#02) (+""!

(24)

!"#$%&'# &(# $' &('#$#))#$* +' &*,"$*,#--#$# ./ )!*0/ $'! &'-/ +#. "$*&# * -# *1

2!$/0-# ./ './0'33/3'*0# *0* +' -'04!')'.' 5!/--$* 6/ '7

81 ./ "$',/ 6/ # $'4!/$+/ '. "$*&# * +' '+$*.' ' +#' 4$!""' 6!03'*0/.' '+$*.'39 3/)'.' :9OCH3 *""!$# 9OC2H5;7 "#$ #<#--* +#../ "$# #03/ +' /&5!/

5!# -' 4$!""' ' '+$*.'33/0* "#$ "*' .#4/$ ' /..# -#$,'0/3'*0' 9OH +#../ !"#$%&'#= >'4!$/81? :@;A

B1 5!'0+' ' (/= 0#. &/ * +' './0' &*0 "'C +' !0 4$!""* /.&* '.'&*= !0/ "*.',#$'33/3'*0# +#' './0' &*0 ./ !&&# 'D/ 6*$,/3'*0# +' *.'4*,#$'A E1 4.' *.'4*,#$' &* F 6*$,/-' "* *0* $#/4'$# &*0 ' 4$!""' 9OH = ./ $#/3'*0#

"$*D*&/ ./ 6*$,/3'*0# +' .#4/,' &*D/.#0-' 6$/ *$4/0* './0' # !) -$/-*= : *.'-/,#0-# *40' ,*.#&*./ +' './0* ' .#4/ /+ !0 *.* 4$!""* 9OH /0&(# # "!G &/"'-/$# &(# *$4/0* './0' )'9 * -$'96!03'*0/.' "* /0* /0&(# .#4/$ ' / +!# * -$# 4$!""' 9OH;A

H1 '0 #4!'-* /..I/ &'!4/-!$/ * -$/,'-# '. !"#$% ' './0' &*0+#0 /0*= >'4!$/ 81? :J;= 6$/ +' .*$* 6/D*$#0+* ./ 6*$,/3'*0# +' !0 %., "'C &*,"/--* # -/)'.#1

(25)

!"#$% &'() *%++$,-,./%0!1., -23,4%/!2% 5,6 +$12,--1 5! -!6%.!00%0!1., 789:' ;% +16!4,$!00%0!1., 5,66, 416,216, 5! -!6%.! 5!+,.5, -!% 5%6 .#4,$1 5! "$#++! %621--!6!2! +$,-,./!< 23, 5%66% =#%./!/> 5! %2=#% +$,-,./, !. -16#0!1.,789:78(:' ;% +16!4,$!00%0!1.,< , =#!.5! 6% ?1$4%0!1., 5! -!61--%.!< @ 5,-!5,$%A!6, !.

(26)

!"#$% &%#'()*+&( !#" ,"--*%)( +$".*/*$0 (1 !#" )*&%2()$!)" +!2()3&*"/( 2*4 1(#+"5 1* &%#+(-!(#6" /7!$*/*66% 1* +*/"#* "8(#$* $)( -)!22* '!#6*%#"/* 9 2)('()*: .*/(;

<+*+$%#% 1!( ,($%1* 2)*#&*2"/* 2() &%#+(#$*)( /7"#&%)"--*% 1(-/* %)-"#%+*/"#*= 1(2%+*6*%#( *# '"+( /* !*1" ( 1(2%+*6*%#( *# '"+( 8"2%)(>?@A;

B" 1*#",*&" 1* &%,( "88(#-" /7"1(+*%#( ( 1* &%,( "88(#-" */ !"#$% !&'"()* 1(-/* %)-"#%+*/"#* +!//" +!2()3&*( #%# 9 "#&%)" .(# &C*")";

D%#% +$"$* +8*/!22"$* #!,()%+* +$!1* " $"/( 2)%2%+*$% 1"* !"/* +* (8*#&( &C( (+*+$%#% 1*8()+* * '"$$%)* &C( *#E(#6"#% /% +$)"$% "!$%:"++(,./"$% )*+!/$"#$(= /*8(//% 1* 2F 1(//" +%/!6*%#(G &%#&(#$)"6*%#( 1* +*/"#*G $(,2()"$!)" 1* )("6*%#(G &%#&(#$)"6*%#( 1* "& !"G $(,2% 1* *#&!."6*%#( ( +,-()* H'"+( 1!)"#$( /" !"/( * +*/"#* "1+%).*$* 8(#-%#% 1(+%).*$* ( !(//* &C( C"##% )("-*$% *#8(&( &%#1(#+"#%I;

B7!#*&" &%+" &C( +* 2!J "K(),")( &%# (+$)(," +*&!)(66" 9 &C( /" '%),"6*%#( 1* !# ,%#%+$)"$% 1* +*/"#* +* C" +%/% +( /" 1(2%+*6*%#( "88*(#( *# '"+( 8"2%)( %22!)( *# '"+( /* !*1" +%$$% &()$( &%#1*6*%#*= !$*/*66"#1% !# +%/8(#$( "#*1)% &%# +*/"#* ,%#%'!#6*%#"/* %22!)( !# +%/8(#$( "#*1)% &%# +*/"#* $)*'!#6*%#"/* ( $(,2* 1* +,-()* #%# 2)%/!#-"$*;

L() !"#$% )*-!")1" /" +*/"#*66"6*%#( *# '"+( 8"2%)(>?@AG (++" 1(8( (++()( (K($$!"$" *# ",.*(#$* *# &!* 9 2)(+(#$( !# &()$% -)"1% 1* 8!%$%G #(&(++*$" 1* +*/"#* 1*+$*//"$*G /" )("6*%#( 9 /(#$" ( )*&C*(1( 1*8()+( %)(; D%#% #(&(++")*( "22")(&&C*"$!)( +%3+$*&"$(; M# '"+( 8"2%)( 9 2%++*.*/( %$$(#()( 2()J 3/, 1* +*/"#* 1* "/$" !"/*$0G 2*4 &%,2"$$* (1 %,%-(#(* 2"-"#1% *# $(),*#* 1* &%+$% ( &%,2/(++*$0 1* 2)%&(++%;

N(/ &"+% *# &!* /" +*/"#*66"6*%#( "88(#-" *# '"+( /* !*1"G /( +!2()3&* 8(#-%#% *,,()+( *# !#" +%/!6*%#( &%,2%+$" 1"//( ,%/(&%/( 1* +*/"#* 1*+&*%/$( *# !# +%/8(#$( %)-"#*&% >OPA; L%*&CQ 9 1*R&*/( (/*,*#")( &%,2/($",(#$( /" 2)(+(#6" 1* "& !" 9 *#(8*$".*/( /" 2%/*,()*66"6*%#( 1* +*/"#* H.*: % $)*:'!#6*%#"/*I *# +%/!6*%#( 2)*," &C( "88(#-" /" )("6*%#( &%# /" +!2()3&*(; M +*/"#* )("-(#1% ')" /%)% '%),"#% 1(-/* "--/%,()"$*; S!(+$* "--/%,()"$* )("-*+&%#% &%# /"

(27)

!"#$%&'#( )#*+,-. ' &./+)#,0#1#,0#2 ') %)1 &3# ,# &+0!$' &# 4 # 0$#1+1#,0# -' .1.*#,#. # )+ !"#$%&'# ')+,'55+0+ ' "$# #,0+ 1.)0. $!*. +6

78'1". '9')'0: -' &.,0$.))+$# &., "$#&' '.,# )+ ;!+,0'0: -' +&;!+ &.,<#$' &# + ;!# 0. "$.&# . !,+ 9+ + $'"$.-!&'9')':=>?@6 7+ ')+,'55+5'.,# ', <+ # )';!'-+ /'#,# &.1!,;!# !0')'55+0+ "#$ )+ !+ # 0$#1+ #1")'&'0: -' $#+)'55+5'.,# # "#$ ' 9+ ' &. 0' -' "$.-!5'.,#6

A.,. 0+0# '1")#1#,0+0# ,!1#$. # 0#&,'&3# "#$ 1.-'%&+$# -'/#$ ' 0'"' -' !"#$%&'2 ')'&'.( . '-. -' ')'&'.( 1#0+))' # . '-' 1#0+))'&'6

B "$'1' '1' !9 0$+0' ')+,'55+0' .,. 0+0' ;!#))' -' .$.6 C+$+*.,+,-. ' ADE &3# ' <.$1+,. ! !9 0$+0. -' .$. $' "#00. + ;!#))' ! #1'&.,-!00.$' ' "!F . #$/+$# &3#2 !) #1'&.,-!00.$# ). 0$+0. 3+ !,. "# .$# 1',.$# + &+! + -#))+ "$# #,5+ -' +&;!+( -#))# -' .1.*#,#'0: -#' *$!""' '-$. ')'&' # -#))+ &.,0+1',+5'.,# !"#$%&'+)#6

!"!" #$$%&'('))*)'%+, -' &'%$%(,.%(,

A#99#,# )# 9'.1.)#&.)# ". +,. # #$# '11.9')'55+0# +00$+/#$ . )8+ .$9'1#,G 0. ', !"#$%&'#( )8'11.9')'55+5'.,# 0$+1'0# )#*+1' &./+)#,0' +00$'9!' &# !,+ 1+**'.$# 0+9')'0: +))+ !"#$%&'# 1.-'%&+0+6

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

D) %,# -' &$#+$# 1+0#$'+)' 9'.1'1#0'&' # "#$ $#,-#$# ' ' 0#1' +$0'%&'+)' #<G %&'#,0' 9'.).*'&+1#,0#( 4 ,#&# +$'. &+"'$# )# 0#&,'&3# -' +-# '.,# + )'/#)). 1.)#&.)+$# +)). &.". -' ".0#$,# &.,0$.))+$# ') ". '5'.,+1#,0.( )8.$'#,0+1#,0. # )+ &.,<.$1+5'.,#=>I@6

(28)

!"!# $%&'(&)% *( &+,+--%,(..+.(/'%

!" #$ %!"! &'(!)$ )$*'(($ +'* *$,'-.*' ,. +*'%'"/. )$ %$,."$ %0,,. %0+'*1#$' ' "'."#2' %(*0&'"($ $" 3*.)! )$ -.,0(.*' ,. )'"%$(4 ' ,5!&!3'"'$(4 )',,! %(*.6 (! )$ %$,."$7 80$")$ %$ *$#!**' . &'(!)$ $")$*'(($ +'* #.*.(('*$//.*' ,. 9!"(4 )',,5.--'"0(. %$,."$//./$!"':

;" &!)! +'* -')'*' )$*'((.&'"(' %' %!"! +*'%'"($ ! &'"! %$,."$ %0 )$ 0". %0+'*1#$' < 0%.*' )',,' &!,'#!,'= #!&' ,' &!,'#!,' >0!*'%#'"($= ! )',,' "."!6 +.*($#',,'= #!&' %!,0/$!"$ #!,,$!$).,$ )$ !*!= #2' %$."! $" 3*.)! )$ *'.3$*' #!" $ 3*0++$ 1".,$ )'$ %$,."$:

?,#0"$ &'(!)$ $"-'#' %$ 9.%."! %0,,5$").3$"' &!*@!,!3$#. )',,. %0+'*1#$'= 0%.")! .) '%'&+$! ,5?AB= $" 80'%(! &!)! %$ *$'%#' %!,! . -.,0(.*' 80.,$6 (.($-.&'"(' ,. 9!"(4 )', 1,& )$ %$,."$ %0,,. 9.%' .) '%'&+$! )',,. *03!%$(4 *$%0,(."(':

;"5.,(*. ($+!,!3$. )$ $").3$"' )', (0((! 80.,$(.($-. *$30.*). ,. -.,0(./$!"' )',,' '"'*3$' )$ ,'3.&' @*. 3,$ .(!&$= #!&' .##.)' "', #.%! )$ &$%0*' ACDE: D &'(!)$ ' 3,$ %(*0&'"($ +$F #!&0"'&'"(' 0($,$//.($ %!"!G

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

?AB K?(!&$# A!*#' B$#*!%#!+'MNOPQG < #!%($(0$(! ). 0" +0"(. %!**'((. ). 0" !"#$%&'&( #2'= %0,,. 9.%' )',,' @!*/' )$ T."6)'*6U..,% #2' %$ $"%(.0*."! @*. +0"(. ' #.&+$!"'= +*!-!#. ,. )'-$./$!"' )',,. ,0#' )$ 0" ,.%'*= !++!*(0".&'"(' $")$*$//.(! %0 )$ '%%.= @!*"'")! 0"5$&&.3$"' (*$)$&'"%$!".,' )', #.&+$!"' %!((! '%.&'7

(29)

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

2'.4,* 6' %&(-)- 6' $-&+%++-?CDB1 E &-+- $F* ') /,-$*..- 6' .')%&'==%='-&* E '& (,%6- 6' 2-6'G$%,* )* .4/*,G$'7 '& /%,+'$-)%,* 6' 2-6'G$%,&* )% )-,- +*&.'-&* .4/*,G$'%)*9 H% 3%,'%='-&* 6' %&(-)- 6' $-&+%++- 3'*&* %..-$'%+% %))% %33*&4+% .')%&'==%='-&*I

*))'..-2*+,-1 .5,4++% 4&% .-,(*&+* )42'&-.% /*, '))42'&%,* ') $%2/'-&* .-++- *.%2* * ') ,')*3%2*&+- 6*))% )4$* ,'J*..% 6%) $%2/'-&* .+*..-7 .4))% :%.* 6*))% 2'.4,% 6*))% 6'K*,*&=% 6' '&6'$* 6' ,'5,%='-&* 5,% )4$* ,'J*..% * )4$* *2*..% .' ,'*.$* % ,'.%)',* %))- ./*..-,* 6*))- .+,%+- '.-)%&+* /,*.*&+* .4) $%2/'-&* #)- ./*..-,* $F* 4&- .+,%+- 6' .')%&' /4L ,%(('4&(*,* E 6' /-$F' &%&-2*+,'0I

2'.4,* 6' J4-,*.$*&=%1 .5,4++% ') )*(%2* $-3%)*&+* $F* .' '&.+%4,% 5,% 2-)*$-)* J4-,*.$*&+' * .')%&'9 M%)' 2-)*$-)*7 .* '))42'&%+*7 *2*++-&-)4$* '& $-,,'./-&6*&=% 6' 4&% 6*+*,2'&%+% )4&(F*==% 6;-&6%9 >) 2'$,-8 .$-/'- % J4-,*.$*&=% E '& (,%6- 6' ,')*3%,* );*2'..'-&* 6' )4$*9 N));*8 2'..'-&* * O4'&6' %))% /,*.*&=% 6*))* 2-)*$-)* J4-,*.$*&+' .4) $%2/'-&*7 3'*&* %..-$'%+% /,*.*&=% 6*' .')%&'I

2'.4,* PM>Q #P-4,'*, M,%&.5-,2 >&5,%,*6 ./*$+,-.$-/R0?@SB?@TB1 O4%&8 6- 4&% 2-)*$-)% -,(%&'$% 3'*&* '&3*.+'+% 6% 4&% ,%6'%='-&* '&5,%,-..% #2*6'- '&5,%,-..-12.5820µm0 );*&*,('% $*64+% 6%))% ,%6'%='-&* .+*..% 3'*&* $-&3*,+'+% '& *&*,('% 3':,%='-&%)*7 )* 3':,%='-&' $F* .' '&.+%4,%&-5,% )* 2-)*$-)* .' +,%64$-&- '& 3%,'%='-&' 6*) 2-2*&+- 6'/-)%,* * O4'&6' '& %..-,:'2*&+-9 N6 -(&' )*(%2* 2-)*$-)%,* $-,,'./-&6* 4&;*&*,('% 6'

(30)

!!"#$%&'()"* +,%(-% - .." !/'))#" -% !!"#$%&'()" 0 /"!!%$%.' #%! .%#' ..' &".'1".' 12' ." 2 ((" 3'('# )"4

!"!# $%&&'()*)+ ,* -*.%)*

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nm J&## '() K* '!!% /'#-"(" . ."#" #' ))%7%); ' -% 1"(!'3,'(6 (: 12' . /"!!%$%.%); -% #' 3%#' 1"( /#")'%(' " $%"&".'1".' %( 3'('# .'4 5( 7 .%- .)'#( )%7 . &## '() 0 .G,!" -'. I5I J*!+,,- () K %( 1,% . .,(32'66 -G"(- -'.. .,1' 0 %(8'#%"#'* 1%#1 172nm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

(31)

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

Riferimenti

Documenti correlati

Sahlins,  invece,  sembra  in  qualche  modo  coniugare  le  due  posizioni  in  un’ottica  poststrutturalista.  La  produzione  «è  qualcosa  di  più  e 

The discussion triggered by the ten Common Basic Principles drafted in 2009 by the European Commission repre- sented an important push for all the successive actions taken by

In fact, its original title was La confusione which became later The Smile on the Face of the Lion in the English translation and then Il sorriso del leone

One of the major drawbacks of the present study is the absence of primary data related to the raw materials contained in the semi-finished products and their respective weights. Base

O è al tempo stesso operatrice di una nuova era e annunciatrice di un profondo cambiamento strutturale nei rapporti tra città sapiente, città economica e città sociale, di

Frequenza respiratoria (categoria) all’arrivo del personale di emergenza sulla scena Ordinale RTS 4 = 10–29 (normale) RTS 3 = &gt;29 (veloce) RTS 2 = 6–9 (lento) RTS 1

Questo obiettivo può essere raggiunto attraverso la funzionalizzazione di SWNT, sfruttando ad esempio la reazione di generazione in situ di un sale di diazonio, per ottenere derivati

Inoltre, aspetto molto più rilevante è il fatto che l’utilizzo di un agente indurente alifatico impedisce la possibilità di omogeneizzare il tutto: questo comporta